JPS4978480A - - Google Patents

Info

Publication number
JPS4978480A
JPS4978480A JP12006772A JP12006772A JPS4978480A JP S4978480 A JPS4978480 A JP S4978480A JP 12006772 A JP12006772 A JP 12006772A JP 12006772 A JP12006772 A JP 12006772A JP S4978480 A JPS4978480 A JP S4978480A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12006772A
Other languages
Japanese (ja)
Other versions
JPS5648969B2 (en)van
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12006772A priority Critical patent/JPS5648969B2/ja
Publication of JPS4978480A publication Critical patent/JPS4978480A/ja
Publication of JPS5648969B2 publication Critical patent/JPS5648969B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Thyristors (AREA)
  • Die Bonding (AREA)
JP12006772A 1972-11-30 1972-11-30 Expired JPS5648969B2 (en)van)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12006772A JPS5648969B2 (en)van) 1972-11-30 1972-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12006772A JPS5648969B2 (en)van) 1972-11-30 1972-11-30

Publications (2)

Publication Number Publication Date
JPS4978480A true JPS4978480A (en)van) 1974-07-29
JPS5648969B2 JPS5648969B2 (en)van) 1981-11-19

Family

ID=14777057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12006772A Expired JPS5648969B2 (en)van) 1972-11-30 1972-11-30

Country Status (1)

Country Link
JP (1) JPS5648969B2 (en)van)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62202530A (ja) * 1986-02-28 1987-09-07 Mitsubishi Electric Corp 半導体装置の製造方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6828742B2 (ja) 2016-05-26 2021-02-10 株式会社ニコン パルス光生成装置、パルス光生成方法、パルス光生成装置を備えた露光装置および検査装置
KR102393457B1 (ko) 2016-05-26 2022-05-02 가부시키가이샤 니콘 펄스 광 생성 장치, 펄스 광 생성 방법, 펄스 광 생성 장치를 구비한 노광 장치 및 검사 장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62202530A (ja) * 1986-02-28 1987-09-07 Mitsubishi Electric Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5648969B2 (en)van) 1981-11-19

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