JPS4975467A - - Google Patents

Info

Publication number
JPS4975467A
JPS4975467A JP11743372A JP11743372A JPS4975467A JP S4975467 A JPS4975467 A JP S4975467A JP 11743372 A JP11743372 A JP 11743372A JP 11743372 A JP11743372 A JP 11743372A JP S4975467 A JPS4975467 A JP S4975467A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11743372A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11743372A priority Critical patent/JPS4975467A/ja
Publication of JPS4975467A publication Critical patent/JPS4975467A/ja
Pending legal-status Critical Current

Links

JP11743372A 1972-11-21 1972-11-21 Pending JPS4975467A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11743372A JPS4975467A (en) 1972-11-21 1972-11-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11743372A JPS4975467A (en) 1972-11-21 1972-11-21

Publications (1)

Publication Number Publication Date
JPS4975467A true JPS4975467A (en) 1974-07-22

Family

ID=14711513

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11743372A Pending JPS4975467A (en) 1972-11-21 1972-11-21

Country Status (1)

Country Link
JP (1) JPS4975467A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53113279A (en) * 1977-03-14 1978-10-03 Kokusai Electric Co Ltd Control method for semiconductor monocrystal manufacturing apparatus
JPS59174598A (en) * 1983-03-18 1984-10-03 Hitachi Cable Ltd Manufacture of semiconductor single crystal of group iii- v compound
JPS6086564U (en) * 1983-11-18 1985-06-14 日立電線株式会社 Single crystal pulling equipment
JPS617577U (en) * 1984-06-14 1986-01-17 日立電線株式会社 Single crystal pulling equipment

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53113279A (en) * 1977-03-14 1978-10-03 Kokusai Electric Co Ltd Control method for semiconductor monocrystal manufacturing apparatus
JPS59174598A (en) * 1983-03-18 1984-10-03 Hitachi Cable Ltd Manufacture of semiconductor single crystal of group iii- v compound
JPS6086564U (en) * 1983-11-18 1985-06-14 日立電線株式会社 Single crystal pulling equipment
JPS6333975Y2 (en) * 1983-11-18 1988-09-08
JPS617577U (en) * 1984-06-14 1986-01-17 日立電線株式会社 Single crystal pulling equipment
JPH0311240Y2 (en) * 1984-06-14 1991-03-19

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