JPS4975467A - - Google Patents
Info
- Publication number
- JPS4975467A JPS4975467A JP11743372A JP11743372A JPS4975467A JP S4975467 A JPS4975467 A JP S4975467A JP 11743372 A JP11743372 A JP 11743372A JP 11743372 A JP11743372 A JP 11743372A JP S4975467 A JPS4975467 A JP S4975467A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11743372A JPS4975467A (en) | 1972-11-21 | 1972-11-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11743372A JPS4975467A (en) | 1972-11-21 | 1972-11-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4975467A true JPS4975467A (en) | 1974-07-22 |
Family
ID=14711513
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11743372A Pending JPS4975467A (en) | 1972-11-21 | 1972-11-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS4975467A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53113279A (en) * | 1977-03-14 | 1978-10-03 | Kokusai Electric Co Ltd | Control method for semiconductor monocrystal manufacturing apparatus |
JPS59174598A (en) * | 1983-03-18 | 1984-10-03 | Hitachi Cable Ltd | Manufacture of semiconductor single crystal of group iii- v compound |
JPS6086564U (en) * | 1983-11-18 | 1985-06-14 | 日立電線株式会社 | Single crystal pulling equipment |
JPS617577U (en) * | 1984-06-14 | 1986-01-17 | 日立電線株式会社 | Single crystal pulling equipment |
-
1972
- 1972-11-21 JP JP11743372A patent/JPS4975467A/ja active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53113279A (en) * | 1977-03-14 | 1978-10-03 | Kokusai Electric Co Ltd | Control method for semiconductor monocrystal manufacturing apparatus |
JPS59174598A (en) * | 1983-03-18 | 1984-10-03 | Hitachi Cable Ltd | Manufacture of semiconductor single crystal of group iii- v compound |
JPS6086564U (en) * | 1983-11-18 | 1985-06-14 | 日立電線株式会社 | Single crystal pulling equipment |
JPS6333975Y2 (en) * | 1983-11-18 | 1988-09-08 | ||
JPS617577U (en) * | 1984-06-14 | 1986-01-17 | 日立電線株式会社 | Single crystal pulling equipment |
JPH0311240Y2 (en) * | 1984-06-14 | 1991-03-19 |