JPS4975062A - - Google Patents

Info

Publication number
JPS4975062A
JPS4975062A JP11776772A JP11776772A JPS4975062A JP S4975062 A JPS4975062 A JP S4975062A JP 11776772 A JP11776772 A JP 11776772A JP 11776772 A JP11776772 A JP 11776772A JP S4975062 A JPS4975062 A JP S4975062A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11776772A
Other languages
Japanese (ja)
Other versions
JPS5147569B2 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11776772A priority Critical patent/JPS5147569B2/ja
Publication of JPS4975062A publication Critical patent/JPS4975062A/ja
Publication of JPS5147569B2 publication Critical patent/JPS5147569B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP11776772A 1972-11-20 1972-11-20 Expired JPS5147569B2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11776772A JPS5147569B2 (de) 1972-11-20 1972-11-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11776772A JPS5147569B2 (de) 1972-11-20 1972-11-20

Publications (2)

Publication Number Publication Date
JPS4975062A true JPS4975062A (de) 1974-07-19
JPS5147569B2 JPS5147569B2 (de) 1976-12-15

Family

ID=14719803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11776772A Expired JPS5147569B2 (de) 1972-11-20 1972-11-20

Country Status (1)

Country Link
JP (1) JPS5147569B2 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5254370A (en) * 1975-10-29 1977-05-02 Fujitsu Ltd Production of semiconductor device
JPS63126A (ja) * 1986-06-19 1988-01-05 Nec Corp 半導体装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5254370A (en) * 1975-10-29 1977-05-02 Fujitsu Ltd Production of semiconductor device
JPS63126A (ja) * 1986-06-19 1988-01-05 Nec Corp 半導体装置

Also Published As

Publication number Publication date
JPS5147569B2 (de) 1976-12-15

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