JPS497388A - - Google Patents
Info
- Publication number
- JPS497388A JPS497388A JP47046974A JP4697472A JPS497388A JP S497388 A JPS497388 A JP S497388A JP 47046974 A JP47046974 A JP 47046974A JP 4697472 A JP4697472 A JP 4697472A JP S497388 A JPS497388 A JP S497388A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Processing Of Solid Wastes (AREA)
- Crushing And Pulverization Processes (AREA)
- Disintegrating Or Milling (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47046974A JPS497388A (ja) | 1972-05-11 | 1972-05-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47046974A JPS497388A (ja) | 1972-05-11 | 1972-05-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS497388A true JPS497388A (ja) | 1974-01-23 |
Family
ID=12762205
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47046974A Pending JPS497388A (ja) | 1972-05-11 | 1972-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS497388A (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56160062A (en) * | 1980-05-14 | 1981-12-09 | Fujitsu Ltd | Manufacture of semiconductor device |
| JPS6159737A (ja) * | 1984-08-30 | 1986-03-27 | Nec Corp | 半導体装置の製造方法 |
| JPS6165441A (ja) * | 1984-09-07 | 1986-04-04 | Mitsubishi Electric Corp | プラズマ窒化シリコン絶縁膜の処理方法 |
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1972
- 1972-05-11 JP JP47046974A patent/JPS497388A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56160062A (en) * | 1980-05-14 | 1981-12-09 | Fujitsu Ltd | Manufacture of semiconductor device |
| JPS6159737A (ja) * | 1984-08-30 | 1986-03-27 | Nec Corp | 半導体装置の製造方法 |
| JPS6165441A (ja) * | 1984-09-07 | 1986-04-04 | Mitsubishi Electric Corp | プラズマ窒化シリコン絶縁膜の処理方法 |
| JPH0329297B2 (ja) * | 1984-09-07 | 1991-04-23 | Mitsubishi Electric Corp |