JPS4970072A - - Google Patents
Info
- Publication number
- JPS4970072A JPS4970072A JP47111421A JP11142172A JPS4970072A JP S4970072 A JPS4970072 A JP S4970072A JP 47111421 A JP47111421 A JP 47111421A JP 11142172 A JP11142172 A JP 11142172A JP S4970072 A JPS4970072 A JP S4970072A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Feedback Control In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47111421A JPS4970072A (ko) | 1972-11-07 | 1972-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47111421A JPS4970072A (ko) | 1972-11-07 | 1972-11-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4970072A true JPS4970072A (ko) | 1974-07-06 |
Family
ID=14560735
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47111421A Pending JPS4970072A (ko) | 1972-11-07 | 1972-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4970072A (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0620908A (ja) * | 1990-12-26 | 1994-01-28 | Korea Electron Telecommun | 固体型アクチュエーターを利用したウェーハの精密駆動装置 |
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1972
- 1972-11-07 JP JP47111421A patent/JPS4970072A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0620908A (ja) * | 1990-12-26 | 1994-01-28 | Korea Electron Telecommun | 固体型アクチュエーターを利用したウェーハの精密駆動装置 |
| JP2539124B2 (ja) * | 1990-12-26 | 1996-10-02 | 財団法人韓国電子通信研究所 | 固体型アクチュエ―タ―を利用したウェ―ハの精密駆動装置 |