JPS4969073A - - Google Patents
Info
- Publication number
- JPS4969073A JPS4969073A JP11116272A JP11116272A JPS4969073A JP S4969073 A JPS4969073 A JP S4969073A JP 11116272 A JP11116272 A JP 11116272A JP 11116272 A JP11116272 A JP 11116272A JP S4969073 A JPS4969073 A JP S4969073A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11116272A JPS4969073A (es) | 1972-11-08 | 1972-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11116272A JPS4969073A (es) | 1972-11-08 | 1972-11-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4969073A true JPS4969073A (es) | 1974-07-04 |
Family
ID=14554035
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11116272A Pending JPS4969073A (es) | 1972-11-08 | 1972-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4969073A (es) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53114670A (en) * | 1977-03-17 | 1978-10-06 | Toshiba Ceramics Co | Jig for diffusion furnace |
| JPH02297925A (ja) * | 1989-01-28 | 1990-12-10 | Kokusai Electric Co Ltd | 縦型ｃｖｄ拡散装置に於けるウェーハ移載方法及び装置 |
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1972
- 1972-11-08 JP JP11116272A patent/JPS4969073A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53114670A (en) * | 1977-03-17 | 1978-10-06 | Toshiba Ceramics Co | Jig for diffusion furnace |
| JPH02297925A (ja) * | 1989-01-28 | 1990-12-10 | Kokusai Electric Co Ltd | 縦型ｃｖｄ拡散装置に於けるウェーハ移載方法及び装置 |