JPS4967576A - - Google Patents
Info
- Publication number
- JPS4967576A JPS4967576A JP10943372A JP10943372A JPS4967576A JP S4967576 A JPS4967576 A JP S4967576A JP 10943372 A JP10943372 A JP 10943372A JP 10943372 A JP10943372 A JP 10943372A JP S4967576 A JPS4967576 A JP S4967576A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Image Analysis (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Image Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10943372A JPS5333029B2 (no) | 1972-11-02 | 1972-11-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10943372A JPS5333029B2 (no) | 1972-11-02 | 1972-11-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4967576A true JPS4967576A (no) | 1974-07-01 |
| JPS5333029B2 JPS5333029B2 (no) | 1978-09-12 |
Family
ID=14510110
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10943372A Expired JPS5333029B2 (no) | 1972-11-02 | 1972-11-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5333029B2 (no) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5180132A (en) * | 1975-01-09 | 1976-07-13 | Kogyo Gijutsuin | Shikisaikokahoni motozuku pataankaisekisochi |
| JPS5267986A (en) * | 1975-12-04 | 1977-06-06 | Fujitsu Ltd | Pattern correction equipment |
| JPH10185531A (ja) * | 1996-10-23 | 1998-07-14 | Nec Corp | 高精度パターンの外観の検査方法および装置 |
-
1972
- 1972-11-02 JP JP10943372A patent/JPS5333029B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5180132A (en) * | 1975-01-09 | 1976-07-13 | Kogyo Gijutsuin | Shikisaikokahoni motozuku pataankaisekisochi |
| JPS5267986A (en) * | 1975-12-04 | 1977-06-06 | Fujitsu Ltd | Pattern correction equipment |
| JPH10185531A (ja) * | 1996-10-23 | 1998-07-14 | Nec Corp | 高精度パターンの外観の検査方法および装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5333029B2 (no) | 1978-09-12 |