JPS4966278A - - Google Patents

Info

Publication number
JPS4966278A
JPS4966278A JP10901472A JP10901472A JPS4966278A JP S4966278 A JPS4966278 A JP S4966278A JP 10901472 A JP10901472 A JP 10901472A JP 10901472 A JP10901472 A JP 10901472A JP S4966278 A JPS4966278 A JP S4966278A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10901472A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10901472A priority Critical patent/JPS4966278A/ja
Publication of JPS4966278A publication Critical patent/JPS4966278A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Dicing (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP10901472A 1972-10-31 1972-10-31 Pending JPS4966278A (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10901472A JPS4966278A (cs) 1972-10-31 1972-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10901472A JPS4966278A (cs) 1972-10-31 1972-10-31

Publications (1)

Publication Number Publication Date
JPS4966278A true JPS4966278A (cs) 1974-06-27

Family

ID=14499371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10901472A Pending JPS4966278A (cs) 1972-10-31 1972-10-31

Country Status (1)

Country Link
JP (1) JPS4966278A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03184360A (ja) * 1989-12-13 1991-08-12 Canon Inc 半導体装置の製造方法
JP2006253402A (ja) * 2005-03-10 2006-09-21 Nec Electronics Corp 半導体装置の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3699644A (en) * 1971-01-04 1972-10-24 Sylvania Electric Prod Method of dividing wafers

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3699644A (en) * 1971-01-04 1972-10-24 Sylvania Electric Prod Method of dividing wafers

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03184360A (ja) * 1989-12-13 1991-08-12 Canon Inc 半導体装置の製造方法
JP2006253402A (ja) * 2005-03-10 2006-09-21 Nec Electronics Corp 半導体装置の製造方法

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