JPS4966188A - - Google Patents

Info

Publication number
JPS4966188A
JPS4966188A JP47106647A JP10664772A JPS4966188A JP S4966188 A JPS4966188 A JP S4966188A JP 47106647 A JP47106647 A JP 47106647A JP 10664772 A JP10664772 A JP 10664772A JP S4966188 A JPS4966188 A JP S4966188A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47106647A
Other languages
Japanese (ja)
Other versions
JPS5225276B2 (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47106647A priority Critical patent/JPS5225276B2/ja
Publication of JPS4966188A publication Critical patent/JPS4966188A/ja
Publication of JPS5225276B2 publication Critical patent/JPS5225276B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP47106647A 1972-10-26 1972-10-26 Expired JPS5225276B2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47106647A JPS5225276B2 (fr) 1972-10-26 1972-10-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47106647A JPS5225276B2 (fr) 1972-10-26 1972-10-26

Publications (2)

Publication Number Publication Date
JPS4966188A true JPS4966188A (fr) 1974-06-26
JPS5225276B2 JPS5225276B2 (fr) 1977-07-06

Family

ID=14438895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47106647A Expired JPS5225276B2 (fr) 1972-10-26 1972-10-26

Country Status (1)

Country Link
JP (1) JPS5225276B2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62119446A (ja) * 1985-11-20 1987-05-30 Ratotsuku Syst Eng Kk 結晶欠陥検査方法及びその検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62119446A (ja) * 1985-11-20 1987-05-30 Ratotsuku Syst Eng Kk 結晶欠陥検査方法及びその検査装置

Also Published As

Publication number Publication date
JPS5225276B2 (fr) 1977-07-06

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