JPS4965783A - - Google Patents
Info
- Publication number
- JPS4965783A JPS4965783A JP10696372A JP10696372A JPS4965783A JP S4965783 A JPS4965783 A JP S4965783A JP 10696372 A JP10696372 A JP 10696372A JP 10696372 A JP10696372 A JP 10696372A JP S4965783 A JPS4965783 A JP S4965783A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10696372A JPS5630699B2 (en:Method) | 1972-10-25 | 1972-10-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10696372A JPS5630699B2 (en:Method) | 1972-10-25 | 1972-10-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4965783A true JPS4965783A (en:Method) | 1974-06-26 |
| JPS5630699B2 JPS5630699B2 (en:Method) | 1981-07-16 |
Family
ID=14446963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10696372A Expired JPS5630699B2 (en:Method) | 1972-10-25 | 1972-10-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5630699B2 (en:Method) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49122979A (en:Method) * | 1973-03-27 | 1974-11-25 | ||
| JPS5260073A (en) * | 1975-11-12 | 1977-05-18 | Mitsubishi Electric Corp | Production of semiconductor device |
| JPS5539650A (en) * | 1978-09-12 | 1980-03-19 | Nec Corp | Manufacture of semiconductor device |
| JPS5638823A (en) * | 1979-08-06 | 1981-04-14 | Toray Ind Inc | Formation of polyimide pattern |
-
1972
- 1972-10-25 JP JP10696372A patent/JPS5630699B2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49122979A (en:Method) * | 1973-03-27 | 1974-11-25 | ||
| JPS5260073A (en) * | 1975-11-12 | 1977-05-18 | Mitsubishi Electric Corp | Production of semiconductor device |
| JPS5539650A (en) * | 1978-09-12 | 1980-03-19 | Nec Corp | Manufacture of semiconductor device |
| JPS5638823A (en) * | 1979-08-06 | 1981-04-14 | Toray Ind Inc | Formation of polyimide pattern |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5630699B2 (en:Method) | 1981-07-16 |