JPS4964911A - - Google Patents

Info

Publication number
JPS4964911A
JPS4964911A JP47105820A JP10582072A JPS4964911A JP S4964911 A JPS4964911 A JP S4964911A JP 47105820 A JP47105820 A JP 47105820A JP 10582072 A JP10582072 A JP 10582072A JP S4964911 A JPS4964911 A JP S4964911A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47105820A
Other languages
Japanese (ja)
Other versions
JPS5135398B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP72105820A priority Critical patent/JPS5135398B2/ja
Publication of JPS4964911A publication Critical patent/JPS4964911A/ja
Publication of JPS5135398B2 publication Critical patent/JPS5135398B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electron Tubes For Measurement (AREA)
JP72105820A 1972-10-24 1972-10-24 Expired JPS5135398B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP72105820A JPS5135398B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-10-24 1972-10-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP72105820A JPS5135398B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-10-24 1972-10-24

Publications (2)

Publication Number Publication Date
JPS4964911A true JPS4964911A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-06-24
JPS5135398B2 JPS5135398B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-10-01

Family

ID=14417695

Family Applications (1)

Application Number Title Priority Date Filing Date
JP72105820A Expired JPS5135398B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-10-24 1972-10-24

Country Status (1)

Country Link
JP (1) JPS5135398B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6427059U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-08-07 1989-02-16

Also Published As

Publication number Publication date
JPS5135398B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-10-01

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