JPS4964549U - - Google Patents
Info
- Publication number
- JPS4964549U JPS4964549U JP10801772U JP10801772U JPS4964549U JP S4964549 U JPS4964549 U JP S4964549U JP 10801772 U JP10801772 U JP 10801772U JP 10801772 U JP10801772 U JP 10801772U JP S4964549 U JPS4964549 U JP S4964549U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10801772U JPS4964549U (enExample) | 1972-09-19 | 1972-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10801772U JPS4964549U (enExample) | 1972-09-19 | 1972-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4964549U true JPS4964549U (enExample) | 1974-06-06 |
Family
ID=28326891
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10801772U Pending JPS4964549U (enExample) | 1972-09-19 | 1972-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4964549U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010047235A1 (ja) * | 2008-10-22 | 2010-04-29 | 国立大学法人東北大学 | マグネトロンスパッタ装置 |
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1972
- 1972-09-19 JP JP10801772U patent/JPS4964549U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010047235A1 (ja) * | 2008-10-22 | 2010-04-29 | 国立大学法人東北大学 | マグネトロンスパッタ装置 |
| JP2010100880A (ja) * | 2008-10-22 | 2010-05-06 | Tohoku Univ | マグネトロンスパッタ装置 |