JPS4964549U - - Google Patents

Info

Publication number
JPS4964549U
JPS4964549U JP10801772U JP10801772U JPS4964549U JP S4964549 U JPS4964549 U JP S4964549U JP 10801772 U JP10801772 U JP 10801772U JP 10801772 U JP10801772 U JP 10801772U JP S4964549 U JPS4964549 U JP S4964549U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10801772U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10801772U priority Critical patent/JPS4964549U/ja
Publication of JPS4964549U publication Critical patent/JPS4964549U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10801772U 1972-09-19 1972-09-19 Pending JPS4964549U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10801772U JPS4964549U (enrdf_load_stackoverflow) 1972-09-19 1972-09-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10801772U JPS4964549U (enrdf_load_stackoverflow) 1972-09-19 1972-09-19

Publications (1)

Publication Number Publication Date
JPS4964549U true JPS4964549U (enrdf_load_stackoverflow) 1974-06-06

Family

ID=28326891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10801772U Pending JPS4964549U (enrdf_load_stackoverflow) 1972-09-19 1972-09-19

Country Status (1)

Country Link
JP (1) JPS4964549U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010047235A1 (ja) * 2008-10-22 2010-04-29 国立大学法人東北大学 マグネトロンスパッタ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010047235A1 (ja) * 2008-10-22 2010-04-29 国立大学法人東北大学 マグネトロンスパッタ装置
JP2010100880A (ja) * 2008-10-22 2010-05-06 Tohoku Univ マグネトロンスパッタ装置

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