JPS4964370A - - Google Patents
Info
- Publication number
- JPS4964370A JPS4964370A JP6969873A JP6969873A JPS4964370A JP S4964370 A JPS4964370 A JP S4964370A JP 6969873 A JP6969873 A JP 6969873A JP 6969873 A JP6969873 A JP 6969873A JP S4964370 A JPS4964370 A JP S4964370A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/02—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion materials in the solid state
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US26502872A | 1972-06-21 | 1972-06-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4964370A true JPS4964370A (enrdf_load_stackoverflow) | 1974-06-21 |
Family
ID=23008647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6969873A Pending JPS4964370A (enrdf_load_stackoverflow) | 1972-06-21 | 1973-06-20 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS4964370A (enrdf_load_stackoverflow) |
| DE (1) | DE2331516A1 (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4929972A (enrdf_load_stackoverflow) * | 1972-07-20 | 1974-03-16 | ||
| JPS5884458A (ja) * | 1981-11-13 | 1983-05-20 | Toshiba Corp | 半導体基板の製造方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3984267A (en) * | 1974-07-26 | 1976-10-05 | Monsanto Company | Process and apparatus for diffusion of semiconductor materials |
-
1973
- 1973-06-20 JP JP6969873A patent/JPS4964370A/ja active Pending
- 1973-06-20 DE DE19732331516 patent/DE2331516A1/de active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4929972A (enrdf_load_stackoverflow) * | 1972-07-20 | 1974-03-16 | ||
| JPS5884458A (ja) * | 1981-11-13 | 1983-05-20 | Toshiba Corp | 半導体基板の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2331516A1 (de) | 1974-01-17 |