JPS4964097A - - Google Patents
Info
- Publication number
- JPS4964097A JPS4964097A JP6208073A JP6208073A JPS4964097A JP S4964097 A JPS4964097 A JP S4964097A JP 6208073 A JP6208073 A JP 6208073A JP 6208073 A JP6208073 A JP 6208073A JP S4964097 A JPS4964097 A JP S4964097A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR39852D FR39852E (fr) | 1972-06-30 | 1931-03-09 | Procédé de production de colorants solides pour cuve |
| GB1483473A GB1416077A (en) | 1972-06-30 | 1973-03-28 | Electron beam apparatus |
| FR7321785A FR2191263B1 (pt) | 1972-06-30 | 1973-07-06 | |
| DE2332091A DE2332091C2 (de) | 1972-06-30 | 1973-07-23 | Verfahren zum Betrieb einer fokussierbaren und ausrichtbaren Elektronenstrahlprojektionsvorrichtung und dafür bestimmte Elektronenstrahlprojektionsvorrichtung |
| US429438A US3876883A (en) | 1972-06-30 | 1973-12-28 | Method and system for focusing and registration in electron beam projection microfabrication |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US26784472A | 1972-06-30 | 1972-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4964097A true JPS4964097A (pt) | 1974-06-21 |
Family
ID=23020368
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6208073A Pending JPS4964097A (pt) | 1972-06-30 | 1973-06-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4964097A (pt) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5487068U (pt) * | 1977-12-01 | 1979-06-20 | ||
| JPS55110041A (en) * | 1979-02-16 | 1980-08-25 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Electron beam projector |
| JP2002093698A (ja) * | 2000-07-14 | 2002-03-29 | Leo Elektronenmikroskopie Gmbh | 電子線リソグラフィー方法および電子光学的リソグラフィーシステム |
-
1973
- 1973-06-04 JP JP6208073A patent/JPS4964097A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5487068U (pt) * | 1977-12-01 | 1979-06-20 | ||
| JPS5647949Y2 (pt) * | 1977-12-01 | 1981-11-10 | ||
| JPS55110041A (en) * | 1979-02-16 | 1980-08-25 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Electron beam projector |
| JP2002093698A (ja) * | 2000-07-14 | 2002-03-29 | Leo Elektronenmikroskopie Gmbh | 電子線リソグラフィー方法および電子光学的リソグラフィーシステム |