JPS4964097A - - Google Patents

Info

Publication number
JPS4964097A
JPS4964097A JP6208073A JP6208073A JPS4964097A JP S4964097 A JPS4964097 A JP S4964097A JP 6208073 A JP6208073 A JP 6208073A JP 6208073 A JP6208073 A JP 6208073A JP S4964097 A JPS4964097 A JP S4964097A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6208073A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR39852D priority Critical patent/FR39852E/en
Priority to GB1483473A priority patent/GB1416077A/en
Application filed filed Critical
Priority to FR7321785A priority patent/FR2191263B1/fr
Priority to DE2332091A priority patent/DE2332091C2/en
Priority to US429438A priority patent/US3876883A/en
Publication of JPS4964097A publication Critical patent/JPS4964097A/ja
Pending legal-status Critical Current

Links

JP6208073A 1972-06-30 1973-06-04 Pending JPS4964097A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR39852D FR39852E (en) 1972-06-30 1931-03-09 Process for the production of solid dyes for vats
GB1483473A GB1416077A (en) 1972-06-30 1973-03-28 Electron beam apparatus
FR7321785A FR2191263B1 (en) 1972-06-30 1973-07-06
DE2332091A DE2332091C2 (en) 1972-06-30 1973-07-23 Method for operating a focusable and alignable electron beam projection device and electron beam projection device intended therefor
US429438A US3876883A (en) 1972-06-30 1973-12-28 Method and system for focusing and registration in electron beam projection microfabrication

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US26784472A 1972-06-30 1972-06-30

Publications (1)

Publication Number Publication Date
JPS4964097A true JPS4964097A (en) 1974-06-21

Family

ID=23020368

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6208073A Pending JPS4964097A (en) 1972-06-30 1973-06-04

Country Status (1)

Country Link
JP (1) JPS4964097A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5487068U (en) * 1977-12-01 1979-06-20
JPS55110041A (en) * 1979-02-16 1980-08-25 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron beam projector
JP2002093698A (en) * 2000-07-14 2002-03-29 Leo Elektronenmikroskopie Gmbh Method and system for electron-beam lithography

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5487068U (en) * 1977-12-01 1979-06-20
JPS5647949Y2 (en) * 1977-12-01 1981-11-10
JPS55110041A (en) * 1979-02-16 1980-08-25 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron beam projector
JP2002093698A (en) * 2000-07-14 2002-03-29 Leo Elektronenmikroskopie Gmbh Method and system for electron-beam lithography

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