JPS4962385A - - Google Patents
Info
- Publication number
- JPS4962385A JPS4962385A JP10440272A JP10440272A JPS4962385A JP S4962385 A JPS4962385 A JP S4962385A JP 10440272 A JP10440272 A JP 10440272A JP 10440272 A JP10440272 A JP 10440272A JP S4962385 A JPS4962385 A JP S4962385A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10440272A JPS5224514B2 (en) | 1972-10-20 | 1972-10-20 | |
US408822A US3897325A (en) | 1972-10-20 | 1973-10-23 | Low temperature sputtering device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10440272A JPS5224514B2 (en) | 1972-10-20 | 1972-10-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4962385A true JPS4962385A (en) | 1974-06-17 |
JPS5224514B2 JPS5224514B2 (en) | 1977-07-01 |
Family
ID=14379711
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10440272A Expired JPS5224514B2 (en) | 1972-10-20 | 1972-10-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5224514B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5117272A (en) * | 1974-08-05 | 1976-02-12 | Toray Industries | RENZOKU SUPATSUTARINGUHOHO |
JPS5391663A (en) * | 1977-01-24 | 1978-08-11 | Hitachi Ltd | Plasma cvd device |
JPH0198162U (en) * | 1987-12-17 | 1989-06-30 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL8001557A (en) * | 1980-03-17 | 1981-10-16 | Philips Nv | DC-AC CONVERTER. |
-
1972
- 1972-10-20 JP JP10440272A patent/JPS5224514B2/ja not_active Expired
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5117272A (en) * | 1974-08-05 | 1976-02-12 | Toray Industries | RENZOKU SUPATSUTARINGUHOHO |
JPS555586B2 (en) * | 1974-08-05 | 1980-02-07 | ||
JPS5391663A (en) * | 1977-01-24 | 1978-08-11 | Hitachi Ltd | Plasma cvd device |
JPS5931977B2 (en) * | 1977-01-24 | 1984-08-06 | 株式会社日立製作所 | Plasma CVD equipment |
JPH0198162U (en) * | 1987-12-17 | 1989-06-30 |
Also Published As
Publication number | Publication date |
---|---|
JPS5224514B2 (en) | 1977-07-01 |