JPS4962385A - - Google Patents

Info

Publication number
JPS4962385A
JPS4962385A JP10440272A JP10440272A JPS4962385A JP S4962385 A JPS4962385 A JP S4962385A JP 10440272 A JP10440272 A JP 10440272A JP 10440272 A JP10440272 A JP 10440272A JP S4962385 A JPS4962385 A JP S4962385A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10440272A
Other languages
Japanese (ja)
Other versions
JPS5224514B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10440272A priority Critical patent/JPS5224514B2/ja
Priority to US408822A priority patent/US3897325A/en
Publication of JPS4962385A publication Critical patent/JPS4962385A/ja
Publication of JPS5224514B2 publication Critical patent/JPS5224514B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10440272A 1972-10-20 1972-10-20 Expired JPS5224514B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10440272A JPS5224514B2 (en) 1972-10-20 1972-10-20
US408822A US3897325A (en) 1972-10-20 1973-10-23 Low temperature sputtering device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10440272A JPS5224514B2 (en) 1972-10-20 1972-10-20

Publications (2)

Publication Number Publication Date
JPS4962385A true JPS4962385A (en) 1974-06-17
JPS5224514B2 JPS5224514B2 (en) 1977-07-01

Family

ID=14379711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10440272A Expired JPS5224514B2 (en) 1972-10-20 1972-10-20

Country Status (1)

Country Link
JP (1) JPS5224514B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5117272A (en) * 1974-08-05 1976-02-12 Toray Industries RENZOKU SUPATSUTARINGUHOHO
JPS5391663A (en) * 1977-01-24 1978-08-11 Hitachi Ltd Plasma cvd device
JPH0198162U (en) * 1987-12-17 1989-06-30

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8001557A (en) * 1980-03-17 1981-10-16 Philips Nv DC-AC CONVERTER.

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5117272A (en) * 1974-08-05 1976-02-12 Toray Industries RENZOKU SUPATSUTARINGUHOHO
JPS555586B2 (en) * 1974-08-05 1980-02-07
JPS5391663A (en) * 1977-01-24 1978-08-11 Hitachi Ltd Plasma cvd device
JPS5931977B2 (en) * 1977-01-24 1984-08-06 株式会社日立製作所 Plasma CVD equipment
JPH0198162U (en) * 1987-12-17 1989-06-30

Also Published As

Publication number Publication date
JPS5224514B2 (en) 1977-07-01

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