JPS4962088A - - Google Patents
Info
- Publication number
- JPS4962088A JPS4962088A JP10463572A JP10463572A JPS4962088A JP S4962088 A JPS4962088 A JP S4962088A JP 10463572 A JP10463572 A JP 10463572A JP 10463572 A JP10463572 A JP 10463572A JP S4962088 A JPS4962088 A JP S4962088A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10463572A JPS4962088A ( ) | 1972-10-18 | 1972-10-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10463572A JPS4962088A ( ) | 1972-10-18 | 1972-10-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4962088A true JPS4962088A ( ) | 1974-06-15 |
Family
ID=14385890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10463572A Pending JPS4962088A ( ) | 1972-10-18 | 1972-10-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4962088A ( ) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5710239A (en) * | 1980-06-20 | 1982-01-19 | Hitachi Ltd | Washing method and apparatus thereof |
| JPH07100444A (ja) * | 1993-10-06 | 1995-04-18 | Hitachi Zosen Corp | 洗浄方法および洗浄装置 |
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1972
- 1972-10-18 JP JP10463572A patent/JPS4962088A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5710239A (en) * | 1980-06-20 | 1982-01-19 | Hitachi Ltd | Washing method and apparatus thereof |
| JPH07100444A (ja) * | 1993-10-06 | 1995-04-18 | Hitachi Zosen Corp | 洗浄方法および洗浄装置 |