JPS4961031A - - Google Patents

Info

Publication number
JPS4961031A
JPS4961031A JP10320572A JP10320572A JPS4961031A JP S4961031 A JPS4961031 A JP S4961031A JP 10320572 A JP10320572 A JP 10320572A JP 10320572 A JP10320572 A JP 10320572A JP S4961031 A JPS4961031 A JP S4961031A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10320572A
Other languages
Japanese (ja)
Other versions
JPS5123376B2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10320572A priority Critical patent/JPS5123376B2/ja
Publication of JPS4961031A publication Critical patent/JPS4961031A/ja
Publication of JPS5123376B2 publication Critical patent/JPS5123376B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10320572A 1972-10-17 1972-10-17 Expired JPS5123376B2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10320572A JPS5123376B2 (https=) 1972-10-17 1972-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10320572A JPS5123376B2 (https=) 1972-10-17 1972-10-17

Publications (2)

Publication Number Publication Date
JPS4961031A true JPS4961031A (https=) 1974-06-13
JPS5123376B2 JPS5123376B2 (https=) 1976-07-16

Family

ID=14348002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10320572A Expired JPS5123376B2 (https=) 1972-10-17 1972-10-17

Country Status (1)

Country Link
JP (1) JPS5123376B2 (https=)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50133176A (https=) * 1974-04-09 1975-10-22
JPS50159477A (https=) * 1974-06-14 1975-12-24
JPS50161476A (https=) * 1974-06-20 1975-12-27
JPS50161477A (https=) * 1974-06-20 1975-12-27
JPS5137084A (ja) * 1974-09-25 1976-03-29 Suwa Seikosha Kk Koshuhaionpureeteingu
JPS51101735A (ja) * 1975-03-06 1976-09-08 Sumitomo Bakelite Co Kinzokuhakumakuhifukunetsukasoseijushifuirumunoseizohoho
JPS51106641A (en) * 1975-03-17 1976-09-21 Matsushita Electric Industrial Co Ltd Ionpureeteingusochi
JPS51112441A (en) * 1975-03-28 1976-10-04 Matsushita Electric Industrial Co Ltd Ionization plating device
JPS5533918U (https=) * 1978-08-23 1980-03-05
JPS5562567U (https=) * 1978-10-20 1980-04-28
JPS5591970A (en) * 1978-12-28 1980-07-11 Jeol Ltd Ion plating device
JPS5681671A (en) * 1979-12-04 1981-07-03 Matsushita Electric Ind Co Ltd Ion plating apparatus
JPS5739169A (en) * 1980-08-19 1982-03-04 Sekisui Chem Co Ltd Preparation of thin film vapor deposited object
JPS58133370A (ja) * 1982-02-01 1983-08-09 Agency Of Ind Science & Technol 物理蒸着における被処理物の放電処理方法

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50133176A (https=) * 1974-04-09 1975-10-22
JPS50159477A (https=) * 1974-06-14 1975-12-24
JPS50161476A (https=) * 1974-06-20 1975-12-27
JPS50161477A (https=) * 1974-06-20 1975-12-27
JPS5137084A (ja) * 1974-09-25 1976-03-29 Suwa Seikosha Kk Koshuhaionpureeteingu
JPS51101735A (ja) * 1975-03-06 1976-09-08 Sumitomo Bakelite Co Kinzokuhakumakuhifukunetsukasoseijushifuirumunoseizohoho
JPS51106641A (en) * 1975-03-17 1976-09-21 Matsushita Electric Industrial Co Ltd Ionpureeteingusochi
JPS51112441A (en) * 1975-03-28 1976-10-04 Matsushita Electric Industrial Co Ltd Ionization plating device
JPS5533918U (https=) * 1978-08-23 1980-03-05
JPS5562567U (https=) * 1978-10-20 1980-04-28
JPS5591970A (en) * 1978-12-28 1980-07-11 Jeol Ltd Ion plating device
JPS5681671A (en) * 1979-12-04 1981-07-03 Matsushita Electric Ind Co Ltd Ion plating apparatus
JPS5739169A (en) * 1980-08-19 1982-03-04 Sekisui Chem Co Ltd Preparation of thin film vapor deposited object
JPS58133370A (ja) * 1982-02-01 1983-08-09 Agency Of Ind Science & Technol 物理蒸着における被処理物の放電処理方法

Also Published As

Publication number Publication date
JPS5123376B2 (https=) 1976-07-16

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