JPS4961031A - - Google Patents

Info

Publication number
JPS4961031A
JPS4961031A JP10320572A JP10320572A JPS4961031A JP S4961031 A JPS4961031 A JP S4961031A JP 10320572 A JP10320572 A JP 10320572A JP 10320572 A JP10320572 A JP 10320572A JP S4961031 A JPS4961031 A JP S4961031A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10320572A
Other languages
Japanese (ja)
Other versions
JPS5123376B2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10320572A priority Critical patent/JPS5123376B2/ja
Publication of JPS4961031A publication Critical patent/JPS4961031A/ja
Publication of JPS5123376B2 publication Critical patent/JPS5123376B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10320572A 1972-10-17 1972-10-17 Expired JPS5123376B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10320572A JPS5123376B2 (cs) 1972-10-17 1972-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10320572A JPS5123376B2 (cs) 1972-10-17 1972-10-17

Publications (2)

Publication Number Publication Date
JPS4961031A true JPS4961031A (cs) 1974-06-13
JPS5123376B2 JPS5123376B2 (cs) 1976-07-16

Family

ID=14348002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10320572A Expired JPS5123376B2 (cs) 1972-10-17 1972-10-17

Country Status (1)

Country Link
JP (1) JPS5123376B2 (cs)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50133176A (cs) * 1974-04-09 1975-10-22
JPS50159477A (cs) * 1974-06-14 1975-12-24
JPS50161476A (cs) * 1974-06-20 1975-12-27
JPS50161477A (cs) * 1974-06-20 1975-12-27
JPS5137084A (ja) * 1974-09-25 1976-03-29 Suwa Seikosha Kk Koshuhaionpureeteingu
JPS51101735A (ja) * 1975-03-06 1976-09-08 Sumitomo Bakelite Co Kinzokuhakumakuhifukunetsukasoseijushifuirumunoseizohoho
JPS51106641A (ja) * 1975-03-17 1976-09-21 Matsushita Electric Ind Co Ltd Ionpureeteingusochi
JPS51112441A (en) * 1975-03-28 1976-10-04 Matsushita Electric Ind Co Ltd Ionization plating device
JPS5533918U (cs) * 1978-08-23 1980-03-05
JPS5562567U (cs) * 1978-10-20 1980-04-28
JPS5591970A (en) * 1978-12-28 1980-07-11 Jeol Ltd Ion plating device
JPS5681671A (en) * 1979-12-04 1981-07-03 Matsushita Electric Ind Co Ltd Ion plating apparatus
JPS5739169A (en) * 1980-08-19 1982-03-04 Sekisui Chem Co Ltd Preparation of thin film vapor deposited object
JPS58133370A (ja) * 1982-02-01 1983-08-09 Agency Of Ind Science & Technol 物理蒸着における被処理物の放電処理方法

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50133176A (cs) * 1974-04-09 1975-10-22
JPS50159477A (cs) * 1974-06-14 1975-12-24
JPS50161476A (cs) * 1974-06-20 1975-12-27
JPS50161477A (cs) * 1974-06-20 1975-12-27
JPS5137084A (ja) * 1974-09-25 1976-03-29 Suwa Seikosha Kk Koshuhaionpureeteingu
JPS51101735A (ja) * 1975-03-06 1976-09-08 Sumitomo Bakelite Co Kinzokuhakumakuhifukunetsukasoseijushifuirumunoseizohoho
JPS51106641A (ja) * 1975-03-17 1976-09-21 Matsushita Electric Ind Co Ltd Ionpureeteingusochi
JPS51112441A (en) * 1975-03-28 1976-10-04 Matsushita Electric Ind Co Ltd Ionization plating device
JPS5533918U (cs) * 1978-08-23 1980-03-05
JPS5562567U (cs) * 1978-10-20 1980-04-28
JPS5591970A (en) * 1978-12-28 1980-07-11 Jeol Ltd Ion plating device
JPS5681671A (en) * 1979-12-04 1981-07-03 Matsushita Electric Ind Co Ltd Ion plating apparatus
JPS5739169A (en) * 1980-08-19 1982-03-04 Sekisui Chem Co Ltd Preparation of thin film vapor deposited object
JPS58133370A (ja) * 1982-02-01 1983-08-09 Agency Of Ind Science & Technol 物理蒸着における被処理物の放電処理方法

Also Published As

Publication number Publication date
JPS5123376B2 (cs) 1976-07-16

Similar Documents

Publication Publication Date Title
CS155031B1 (cs)
JPS4956973A (cs)
CS155643B1 (cs)
JPS4970447U (cs)
JPS4977817A (cs)
CS153727B1 (cs)
CS154083B1 (cs)
CS154491B1 (cs)
CS155940B1 (cs)
CS155620B1 (cs)
CS155580B1 (cs)
CS155091B1 (cs)
CH567260A5 (cs)
CH579311A5 (cs)
CH561855A5 (cs)
CH561859A5 (cs)
CH562659A5 (cs)
CH562938A5 (cs)
CH563877A5 (cs)
CH564236A5 (cs)
CH565177A5 (cs)
CH565917A5 (cs)
CH566857A5 (cs)
CH567021A5 (cs)
CH561484A5 (cs)