JPS4960754A - - Google Patents
Info
- Publication number
- JPS4960754A JPS4960754A JP47101874A JP10187472A JPS4960754A JP S4960754 A JPS4960754 A JP S4960754A JP 47101874 A JP47101874 A JP 47101874A JP 10187472 A JP10187472 A JP 10187472A JP S4960754 A JPS4960754 A JP S4960754A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10187472A JPS549900B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-10-13 | 1972-10-13 | |
| US05/405,269 US3941980A (en) | 1972-10-13 | 1973-10-11 | Scanning photoelectric microscope |
| GB4787473A GB1445745A (en) | 1972-10-13 | 1973-10-12 | Scanning photoelectric microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10187472A JPS549900B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-10-13 | 1972-10-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4960754A true JPS4960754A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-06-12 |
| JPS549900B2 JPS549900B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1979-04-28 |
Family
ID=14312104
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10187472A Expired JPS549900B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-10-13 | 1972-10-13 |
Country Status (3)
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5322760A (en) * | 1976-08-16 | 1978-03-02 | Hitachi Ltd | Relative position detector of target objects |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51140488A (en) * | 1975-05-30 | 1976-12-03 | Hitachi Ltd | Mask alignment device |
| JPS55162756A (en) * | 1979-06-04 | 1980-12-18 | Mitsubishi Chem Ind Ltd | Preparation of cyclohexenedicarboxylic acid diamide |
| GB2131162B (en) * | 1982-11-27 | 1986-04-30 | Ferranti Plc | Aligning objects |
| US4959552A (en) * | 1988-02-09 | 1990-09-25 | Carl-Zeiss-Stiftung | Microscope arranged for measuring microscopic structures |
| US5189545A (en) * | 1989-05-18 | 1993-02-23 | Mitsubishi Denki Kabushiki Kaisha | Optical deflector and display unit using the same |
| US8731278B2 (en) * | 2011-08-15 | 2014-05-20 | Molecular Devices, Inc. | System and method for sectioning a microscopy image for parallel processing |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3299272A (en) * | 1963-02-09 | 1967-01-17 | Ricoh Kk | Photosensitive system for taking out desired portions of records on microfilm |
| US3588462A (en) * | 1966-12-23 | 1971-06-28 | Bausch & Lomb | Fringe interpolator and counter |
| US3560097A (en) * | 1967-05-03 | 1971-02-02 | Anatoly Alexandrovich Gavrilki | Photoelectric microscope |
| CH549820A (de) * | 1968-09-27 | 1974-05-31 | Agfa Gevaert Ag | Verfahren und vorrichtung zum automatischen erkennen der einen filmstreifen in bildfelder aufteilenden stege. |
| JPS5022416B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1969-05-14 | 1975-07-30 | ||
| GB1273429A (en) * | 1969-08-01 | 1972-05-10 | Standard Telephones Cables Ltd | Improvements in or relating to measuring instruments |
| FR2069876A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1969-11-25 | 1971-09-10 | Thomson Csf | |
| US3731064A (en) * | 1970-07-28 | 1973-05-01 | Pitney Bowes Alpex | Data processing system and reader therefor |
| US3796497A (en) * | 1971-12-01 | 1974-03-12 | Ibm | Optical alignment method and apparatus |
-
1972
- 1972-10-13 JP JP10187472A patent/JPS549900B2/ja not_active Expired
-
1973
- 1973-10-11 US US05/405,269 patent/US3941980A/en not_active Expired - Lifetime
- 1973-10-12 GB GB4787473A patent/GB1445745A/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5322760A (en) * | 1976-08-16 | 1978-03-02 | Hitachi Ltd | Relative position detector of target objects |
Also Published As
| Publication number | Publication date |
|---|---|
| GB1445745A (en) | 1976-08-11 |
| JPS549900B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1979-04-28 |
| US3941980A (en) | 1976-03-02 |