GB1445745A - Scanning photoelectric microscope - Google Patents

Scanning photoelectric microscope

Info

Publication number
GB1445745A
GB1445745A GB4787473A GB4787473A GB1445745A GB 1445745 A GB1445745 A GB 1445745A GB 4787473 A GB4787473 A GB 4787473A GB 4787473 A GB4787473 A GB 4787473A GB 1445745 A GB1445745 A GB 1445745A
Authority
GB
United Kingdom
Prior art keywords
scanning photoelectric
photoelectric microscope
microscope
scanning
photoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4787473A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of GB1445745A publication Critical patent/GB1445745A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
GB4787473A 1972-10-13 1973-10-12 Scanning photoelectric microscope Expired GB1445745A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10187472A JPS549900B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-10-13 1972-10-13

Publications (1)

Publication Number Publication Date
GB1445745A true GB1445745A (en) 1976-08-11

Family

ID=14312104

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4787473A Expired GB1445745A (en) 1972-10-13 1973-10-12 Scanning photoelectric microscope

Country Status (3)

Country Link
US (1) US3941980A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS549900B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB1445745A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2131162A (en) * 1982-11-27 1984-06-13 Ferranti Plc Aligning objects

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51140488A (en) * 1975-05-30 1976-12-03 Hitachi Ltd Mask alignment device
JPS5322760A (en) * 1976-08-16 1978-03-02 Hitachi Ltd Relative position detector of target objects
JPS55162756A (en) * 1979-06-04 1980-12-18 Mitsubishi Chem Ind Ltd Preparation of cyclohexenedicarboxylic acid diamide
US4959552A (en) * 1988-02-09 1990-09-25 Carl-Zeiss-Stiftung Microscope arranged for measuring microscopic structures
US5189545A (en) * 1989-05-18 1993-02-23 Mitsubishi Denki Kabushiki Kaisha Optical deflector and display unit using the same
US8731278B2 (en) * 2011-08-15 2014-05-20 Molecular Devices, Inc. System and method for sectioning a microscopy image for parallel processing

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3299272A (en) * 1963-02-09 1967-01-17 Ricoh Kk Photosensitive system for taking out desired portions of records on microfilm
US3588462A (en) * 1966-12-23 1971-06-28 Bausch & Lomb Fringe interpolator and counter
US3560097A (en) * 1967-05-03 1971-02-02 Anatoly Alexandrovich Gavrilki Photoelectric microscope
CH549820A (de) * 1968-09-27 1974-05-31 Agfa Gevaert Ag Verfahren und vorrichtung zum automatischen erkennen der einen filmstreifen in bildfelder aufteilenden stege.
JPS5022416B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1969-05-14 1975-07-30
GB1273429A (en) * 1969-08-01 1972-05-10 Standard Telephones Cables Ltd Improvements in or relating to measuring instruments
FR2069876A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1969-11-25 1971-09-10 Thomson Csf
US3731064A (en) * 1970-07-28 1973-05-01 Pitney Bowes Alpex Data processing system and reader therefor
US3796497A (en) * 1971-12-01 1974-03-12 Ibm Optical alignment method and apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2131162A (en) * 1982-11-27 1984-06-13 Ferranti Plc Aligning objects
US4538177A (en) * 1982-11-27 1985-08-27 plc Ferranti Automatic equipment

Also Published As

Publication number Publication date
JPS549900B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-04-28
JPS4960754A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-06-12
US3941980A (en) 1976-03-02

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee