JPS4960046U - - Google Patents
Info
- Publication number
- JPS4960046U JPS4960046U JP10427272U JP10427272U JPS4960046U JP S4960046 U JPS4960046 U JP S4960046U JP 10427272 U JP10427272 U JP 10427272U JP 10427272 U JP10427272 U JP 10427272U JP S4960046 U JPS4960046 U JP S4960046U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10427272U JPS4960046U (en, 2012) | 1972-09-08 | 1972-09-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10427272U JPS4960046U (en, 2012) | 1972-09-08 | 1972-09-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4960046U true JPS4960046U (en, 2012) | 1974-05-27 |
Family
ID=28316289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10427272U Pending JPS4960046U (en, 2012) | 1972-09-08 | 1972-09-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4960046U (en, 2012) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52117548U (en, 2012) * | 1976-03-02 | 1977-09-06 | ||
| JPS5332851U (en, 2012) * | 1976-08-26 | 1978-03-22 | ||
| WO2010047235A1 (ja) * | 2008-10-22 | 2010-04-29 | 国立大学法人東北大学 | マグネトロンスパッタ装置 |
-
1972
- 1972-09-08 JP JP10427272U patent/JPS4960046U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52117548U (en, 2012) * | 1976-03-02 | 1977-09-06 | ||
| JPS5332851U (en, 2012) * | 1976-08-26 | 1978-03-22 | ||
| WO2010047235A1 (ja) * | 2008-10-22 | 2010-04-29 | 国立大学法人東北大学 | マグネトロンスパッタ装置 |
| JP2010100880A (ja) * | 2008-10-22 | 2010-05-06 | Tohoku Univ | マグネトロンスパッタ装置 |