JPS4959526A - - Google Patents

Info

Publication number
JPS4959526A
JPS4959526A JP6647973A JP6647973A JPS4959526A JP S4959526 A JPS4959526 A JP S4959526A JP 6647973 A JP6647973 A JP 6647973A JP 6647973 A JP6647973 A JP 6647973A JP S4959526 A JPS4959526 A JP S4959526A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6647973A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4959526A publication Critical patent/JPS4959526A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
    • G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
    • G05F1/10—Regulating voltage or current
    • G05F1/46—Regulating voltage or current wherein the variable actually regulated by the final control device is dc
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/243—Beam current control or regulation circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Automation & Control Theory (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
JP6647973A 1972-07-03 1973-06-14 Pending JPS4959526A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US26828472A 1972-07-03 1972-07-03

Publications (1)

Publication Number Publication Date
JPS4959526A true JPS4959526A (en) 1974-06-10

Family

ID=23022270

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6647973A Pending JPS4959526A (en) 1972-07-03 1973-06-14

Country Status (5)

Country Link
JP (1) JPS4959526A (en)
CA (1) CA982234A (en)
DE (1) DE2332604A1 (en)
FR (1) FR2191258B1 (en)
IT (1) IT988681B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008271559A (en) * 2007-04-19 2008-11-06 Avago Technologies Wireless Ip (Singapore) Pte Ltd Multilayer transducer with annular contact
US10129656B2 (en) 2009-01-30 2018-11-13 Avago Technologies International Sales Pte. Limited Active temperature control of piezoelectric membrane-based micro-electromechanical devices

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3175821D1 (en) * 1981-10-21 1987-02-12 Hell Rudolf Dr Ing Gmbh Highly stabilized beam generator for charged particles

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE221138C (en) * 1971-04-30

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008271559A (en) * 2007-04-19 2008-11-06 Avago Technologies Wireless Ip (Singapore) Pte Ltd Multilayer transducer with annular contact
US10129656B2 (en) 2009-01-30 2018-11-13 Avago Technologies International Sales Pte. Limited Active temperature control of piezoelectric membrane-based micro-electromechanical devices

Also Published As

Publication number Publication date
FR2191258A1 (en) 1974-02-01
CA982234A (en) 1976-01-20
FR2191258B1 (en) 1976-05-28
DE2332604A1 (en) 1974-01-24
IT988681B (en) 1975-04-30

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