JPS4958910U - - Google Patents
Info
- Publication number
- JPS4958910U JPS4958910U JP10495372U JP10495372U JPS4958910U JP S4958910 U JPS4958910 U JP S4958910U JP 10495372 U JP10495372 U JP 10495372U JP 10495372 U JP10495372 U JP 10495372U JP S4958910 U JPS4958910 U JP S4958910U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Separation Of Gases By Adsorption (AREA)
- Filtering Materials (AREA)
- Gas Separation By Absorption (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10495372U JPS5128492Y2 (cs) | 1972-09-08 | 1972-09-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10495372U JPS5128492Y2 (cs) | 1972-09-08 | 1972-09-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4958910U true JPS4958910U (cs) | 1974-05-24 |
| JPS5128492Y2 JPS5128492Y2 (cs) | 1976-07-19 |
Family
ID=28318250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10495372U Expired JPS5128492Y2 (cs) | 1972-09-08 | 1972-09-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5128492Y2 (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03106021A (ja) * | 1989-09-20 | 1991-05-02 | Tokyo Electron Ltd | アッシング装置 |
| JP2020028825A (ja) * | 2018-08-21 | 2020-02-27 | 株式会社荏原製作所 | フッ素化合物除去装置、酸素除去装置、不純物除去装置の製造方法、および酸素除去装置の立ち上げ方法 |
-
1972
- 1972-09-08 JP JP10495372U patent/JPS5128492Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03106021A (ja) * | 1989-09-20 | 1991-05-02 | Tokyo Electron Ltd | アッシング装置 |
| JP2020028825A (ja) * | 2018-08-21 | 2020-02-27 | 株式会社荏原製作所 | フッ素化合物除去装置、酸素除去装置、不純物除去装置の製造方法、および酸素除去装置の立ち上げ方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5128492Y2 (cs) | 1976-07-19 |