JPS4957845A - - Google Patents

Info

Publication number
JPS4957845A
JPS4957845A JP47097700A JP9770072A JPS4957845A JP S4957845 A JPS4957845 A JP S4957845A JP 47097700 A JP47097700 A JP 47097700A JP 9770072 A JP9770072 A JP 9770072A JP S4957845 A JPS4957845 A JP S4957845A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP47097700A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47097700A priority Critical patent/JPS4957845A/ja
Publication of JPS4957845A publication Critical patent/JPS4957845A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Holo Graphy (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP47097700A 1972-09-30 1972-09-30 Pending JPS4957845A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47097700A JPS4957845A (enrdf_load_stackoverflow) 1972-09-30 1972-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47097700A JPS4957845A (enrdf_load_stackoverflow) 1972-09-30 1972-09-30

Publications (1)

Publication Number Publication Date
JPS4957845A true JPS4957845A (enrdf_load_stackoverflow) 1974-06-05

Family

ID=14199192

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47097700A Pending JPS4957845A (enrdf_load_stackoverflow) 1972-09-30 1972-09-30

Country Status (1)

Country Link
JP (1) JPS4957845A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5745933A (en) * 1980-09-02 1982-03-16 Nec Corp Heat treating method and device for semiconductor wafer
JPS58154233A (ja) * 1982-03-10 1983-09-13 Agency Of Ind Science & Technol 半導体材料の周期的エツチング方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5745933A (en) * 1980-09-02 1982-03-16 Nec Corp Heat treating method and device for semiconductor wafer
JPS58154233A (ja) * 1982-03-10 1983-09-13 Agency Of Ind Science & Technol 半導体材料の周期的エツチング方法

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