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Priority to JP47046811ApriorityCriticalpatent/JPS5131753B2/ja
Publication of JPS495767ApublicationCriticalpatent/JPS495767A/ja
Publication of JPS5131753B2publicationCriticalpatent/JPS5131753B2/ja
Messeinrichtung zur kontaktfreien erfassung des abstandes einer metallischen flaeche von einer gegenflaeche und auswerteverfahren fuer eine solche messeinrichtu ng