JPS4954268A - - Google Patents
Info
- Publication number
- JPS4954268A JPS4954268A JP47098450A JP9845072A JPS4954268A JP S4954268 A JPS4954268 A JP S4954268A JP 47098450 A JP47098450 A JP 47098450A JP 9845072 A JP9845072 A JP 9845072A JP S4954268 A JPS4954268 A JP S4954268A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Incineration Of Waste (AREA)
- Treating Waste Gases (AREA)
- Separation Of Gases By Adsorption (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9845072A JPS5641292B2 (xx) | 1972-09-30 | 1972-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9845072A JPS5641292B2 (xx) | 1972-09-30 | 1972-09-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4954268A true JPS4954268A (xx) | 1974-05-27 |
| JPS5641292B2 JPS5641292B2 (xx) | 1981-09-28 |
Family
ID=14220050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9845072A Expired JPS5641292B2 (xx) | 1972-09-30 | 1972-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5641292B2 (xx) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01288317A (ja) * | 1987-06-19 | 1989-11-20 | L'air Liquide | 電子部品の製造に伴うガス状流出物の処理方法および該方法を実施するための焼却装置 |
| JPH04290525A (ja) * | 1991-03-19 | 1992-10-15 | Ebara Infilco Co Ltd | 排ガス処理方法および装置 |
-
1972
- 1972-09-30 JP JP9845072A patent/JPS5641292B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01288317A (ja) * | 1987-06-19 | 1989-11-20 | L'air Liquide | 電子部品の製造に伴うガス状流出物の処理方法および該方法を実施するための焼却装置 |
| JPH04290525A (ja) * | 1991-03-19 | 1992-10-15 | Ebara Infilco Co Ltd | 排ガス処理方法および装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5641292B2 (xx) | 1981-09-28 |