JPS4953140A - - Google Patents

Info

Publication number
JPS4953140A
JPS4953140A JP7973373A JP7973373A JPS4953140A JP S4953140 A JPS4953140 A JP S4953140A JP 7973373 A JP7973373 A JP 7973373A JP 7973373 A JP7973373 A JP 7973373A JP S4953140 A JPS4953140 A JP S4953140A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7973373A
Other languages
Japanese (ja)
Other versions
JPS5551018B2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4953140A publication Critical patent/JPS4953140A/ja
Publication of JPS5551018B2 publication Critical patent/JPS5551018B2/ja
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0005Separation of the coating from the substrate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP7973373A 1972-07-14 1973-07-14 Expired JPS5551018B2 (en:Method)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3307572A GB1434016A (en) 1972-07-14 1972-07-14 Alloy production

Publications (2)

Publication Number Publication Date
JPS4953140A true JPS4953140A (en:Method) 1974-05-23
JPS5551018B2 JPS5551018B2 (en:Method) 1980-12-22

Family

ID=10348218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7973373A Expired JPS5551018B2 (en:Method) 1972-07-14 1973-07-14

Country Status (5)

Country Link
JP (1) JPS5551018B2 (en:Method)
CA (1) CA1016820A (en:Method)
DE (1) DE2335302A1 (en:Method)
FR (1) FR2193091B1 (en:Method)
GB (1) GB1434016A (en:Method)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6022897A (ja) * 1984-06-13 1985-02-05 Matsushita Electric Ind Co Ltd マイクロホン
JPS6137416U (ja) * 1984-08-09 1986-03-08 日産自動車株式会社 内燃機関の排気微粒子処理装置

Also Published As

Publication number Publication date
DE2335302A1 (de) 1974-01-31
JPS5551018B2 (en:Method) 1980-12-22
FR2193091B1 (en:Method) 1977-02-18
GB1434016A (en) 1976-04-28
FR2193091A1 (en:Method) 1974-02-15
CA1016820A (en) 1977-09-06

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