JPS495270A - - Google Patents
Info
- Publication number
- JPS495270A JPS495270A JP4313772A JP4313772A JPS495270A JP S495270 A JPS495270 A JP S495270A JP 4313772 A JP4313772 A JP 4313772A JP 4313772 A JP4313772 A JP 4313772A JP S495270 A JPS495270 A JP S495270A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4313772A JPS495270A (ja) | 1972-04-29 | 1972-04-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4313772A JPS495270A (ja) | 1972-04-29 | 1972-04-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS495270A true JPS495270A (ja) | 1974-01-17 |
Family
ID=12655439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4313772A Pending JPS495270A (ja) | 1972-04-29 | 1972-04-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS495270A (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS503269A (ja) * | 1973-05-11 | 1975-01-14 | ||
| JPS5092685A (ja) * | 1973-12-14 | 1975-07-24 | ||
| JPH02224227A (ja) * | 1989-02-25 | 1990-09-06 | Sony Corp | 金属シリサイドの成膜方法 |
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1972
- 1972-04-29 JP JP4313772A patent/JPS495270A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS503269A (ja) * | 1973-05-11 | 1975-01-14 | ||
| JPS5092685A (ja) * | 1973-12-14 | 1975-07-24 | ||
| JPS5430638B2 (ja) * | 1973-12-14 | 1979-10-02 | ||
| JPH02224227A (ja) * | 1989-02-25 | 1990-09-06 | Sony Corp | 金属シリサイドの成膜方法 |