JPS495021U - - Google Patents

Info

Publication number
JPS495021U
JPS495021U JP4298572U JP4298572U JPS495021U JP S495021 U JPS495021 U JP S495021U JP 4298572 U JP4298572 U JP 4298572U JP 4298572 U JP4298572 U JP 4298572U JP S495021 U JPS495021 U JP S495021U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4298572U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4298572U priority Critical patent/JPS495021U/ja
Publication of JPS495021U publication Critical patent/JPS495021U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Pressure Vessels And Lids Thereof (AREA)
JP4298572U 1972-04-13 1972-04-13 Pending JPS495021U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4298572U JPS495021U (enrdf_load_html_response) 1972-04-13 1972-04-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4298572U JPS495021U (enrdf_load_html_response) 1972-04-13 1972-04-13

Publications (1)

Publication Number Publication Date
JPS495021U true JPS495021U (enrdf_load_html_response) 1974-01-17

Family

ID=27916298

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4298572U Pending JPS495021U (enrdf_load_html_response) 1972-04-13 1972-04-13

Country Status (1)

Country Link
JP (1) JPS495021U (enrdf_load_html_response)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009208658A (ja) * 2008-03-05 2009-09-17 Taiyo Nippon Sanso Corp 真空装置用扉開閉装置
JP2009267356A (ja) * 2008-04-22 2009-11-12 Advanced Display Process Engineering Co Ltd 基板処理装置及び基板処理装置内部の工程空間を開閉する方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009208658A (ja) * 2008-03-05 2009-09-17 Taiyo Nippon Sanso Corp 真空装置用扉開閉装置
JP2009267356A (ja) * 2008-04-22 2009-11-12 Advanced Display Process Engineering Co Ltd 基板処理装置及び基板処理装置内部の工程空間を開閉する方法

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