JPS494977A - - Google Patents
Info
- Publication number
- JPS494977A JPS494977A JP4199472A JP4199472A JPS494977A JP S494977 A JPS494977 A JP S494977A JP 4199472 A JP4199472 A JP 4199472A JP 4199472 A JP4199472 A JP 4199472A JP S494977 A JPS494977 A JP S494977A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4199472A JPS5135348B2 (ja) | 1972-04-26 | 1972-04-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4199472A JPS5135348B2 (ja) | 1972-04-26 | 1972-04-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS494977A true JPS494977A (ja) | 1974-01-17 |
| JPS5135348B2 JPS5135348B2 (ja) | 1976-10-01 |
Family
ID=12623737
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4199472A Expired JPS5135348B2 (ja) | 1972-04-26 | 1972-04-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5135348B2 (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5842521U (ja) * | 1981-09-17 | 1983-03-22 | 松下電器産業株式会社 | ガス燃焼装置 |
| JPS6321821A (ja) * | 1986-07-15 | 1988-01-29 | Sanyo Electric Co Ltd | 半導体製造方法及び製造装置 |
| JPH04198480A (ja) * | 1990-11-29 | 1992-07-17 | Canon Inc | 機能性堆積膜製造装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5626050Y2 (ja) * | 1977-10-04 | 1981-06-19 |
-
1972
- 1972-04-26 JP JP4199472A patent/JPS5135348B2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5842521U (ja) * | 1981-09-17 | 1983-03-22 | 松下電器産業株式会社 | ガス燃焼装置 |
| JPS6226663Y2 (ja) * | 1981-09-17 | 1987-07-08 | ||
| JPS6321821A (ja) * | 1986-07-15 | 1988-01-29 | Sanyo Electric Co Ltd | 半導体製造方法及び製造装置 |
| JPH04198480A (ja) * | 1990-11-29 | 1992-07-17 | Canon Inc | 機能性堆積膜製造装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5135348B2 (ja) | 1976-10-01 |