JPS5135348B2 - - Google Patents

Info

Publication number
JPS5135348B2
JPS5135348B2 JP4199472A JP4199472A JPS5135348B2 JP S5135348 B2 JPS5135348 B2 JP S5135348B2 JP 4199472 A JP4199472 A JP 4199472A JP 4199472 A JP4199472 A JP 4199472A JP S5135348 B2 JPS5135348 B2 JP S5135348B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4199472A
Other versions
JPS494977A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4199472A priority Critical patent/JPS5135348B2/ja
Publication of JPS494977A publication Critical patent/JPS494977A/ja
Publication of JPS5135348B2 publication Critical patent/JPS5135348B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP4199472A 1972-04-26 1972-04-26 Expired JPS5135348B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4199472A JPS5135348B2 (ja) 1972-04-26 1972-04-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4199472A JPS5135348B2 (ja) 1972-04-26 1972-04-26

Publications (2)

Publication Number Publication Date
JPS494977A JPS494977A (ja) 1974-01-17
JPS5135348B2 true JPS5135348B2 (ja) 1976-10-01

Family

ID=12623737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4199472A Expired JPS5135348B2 (ja) 1972-04-26 1972-04-26

Country Status (1)

Country Link
JP (1) JPS5135348B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5626050Y2 (ja) * 1977-10-04 1981-06-19

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5842521U (ja) * 1981-09-17 1983-03-22 松下電器産業株式会社 ガス燃焼装置
JPS6321821A (ja) * 1986-07-15 1988-01-29 Sanyo Electric Co Ltd 半導体製造方法及び製造装置
JP2849206B2 (ja) * 1990-11-29 1999-01-20 キヤノン株式会社 機能性堆積膜製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5626050Y2 (ja) * 1977-10-04 1981-06-19

Also Published As

Publication number Publication date
JPS494977A (ja) 1974-01-17

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