JPS494977A - - Google Patents

Info

Publication number
JPS494977A
JPS494977A JP4199472A JP4199472A JPS494977A JP S494977 A JPS494977 A JP S494977A JP 4199472 A JP4199472 A JP 4199472A JP 4199472 A JP4199472 A JP 4199472A JP S494977 A JPS494977 A JP S494977A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4199472A
Other languages
Japanese (ja)
Other versions
JPS5135348B2 (US08197722-20120612-C00042.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4199472A priority Critical patent/JPS5135348B2/ja
Publication of JPS494977A publication Critical patent/JPS494977A/ja
Publication of JPS5135348B2 publication Critical patent/JPS5135348B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP4199472A 1972-04-26 1972-04-26 Expired JPS5135348B2 (US08197722-20120612-C00042.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4199472A JPS5135348B2 (US08197722-20120612-C00042.png) 1972-04-26 1972-04-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4199472A JPS5135348B2 (US08197722-20120612-C00042.png) 1972-04-26 1972-04-26

Publications (2)

Publication Number Publication Date
JPS494977A true JPS494977A (US08197722-20120612-C00042.png) 1974-01-17
JPS5135348B2 JPS5135348B2 (US08197722-20120612-C00042.png) 1976-10-01

Family

ID=12623737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4199472A Expired JPS5135348B2 (US08197722-20120612-C00042.png) 1972-04-26 1972-04-26

Country Status (1)

Country Link
JP (1) JPS5135348B2 (US08197722-20120612-C00042.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5842521U (ja) * 1981-09-17 1983-03-22 松下電器産業株式会社 ガス燃焼装置
JPS6321821A (ja) * 1986-07-15 1988-01-29 Sanyo Electric Co Ltd 半導体製造方法及び製造装置
JPH04198480A (ja) * 1990-11-29 1992-07-17 Canon Inc 機能性堆積膜製造装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5626050Y2 (US08197722-20120612-C00042.png) * 1977-10-04 1981-06-19

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5842521U (ja) * 1981-09-17 1983-03-22 松下電器産業株式会社 ガス燃焼装置
JPS6226663Y2 (US08197722-20120612-C00042.png) * 1981-09-17 1987-07-08
JPS6321821A (ja) * 1986-07-15 1988-01-29 Sanyo Electric Co Ltd 半導体製造方法及び製造装置
JPH04198480A (ja) * 1990-11-29 1992-07-17 Canon Inc 機能性堆積膜製造装置

Also Published As

Publication number Publication date
JPS5135348B2 (US08197722-20120612-C00042.png) 1976-10-01

Similar Documents

Publication Publication Date Title
FR2205631A1 (US08197722-20120612-C00042.png)
FR2175145A1 (US08197722-20120612-C00042.png)
JPS5122490B2 (US08197722-20120612-C00042.png)
AU465394B2 (US08197722-20120612-C00042.png)
JPS5135348B2 (US08197722-20120612-C00042.png)
JPS5138722Y2 (US08197722-20120612-C00042.png)
JPS5539839B2 (US08197722-20120612-C00042.png)
JPS511354B2 (US08197722-20120612-C00042.png)
JPS4946095A (US08197722-20120612-C00042.png)
JPS4910036U (US08197722-20120612-C00042.png)
JPS4928235U (US08197722-20120612-C00042.png)
JPS539097Y2 (US08197722-20120612-C00042.png)
JPS48104692U (US08197722-20120612-C00042.png)
JPS4969297A (US08197722-20120612-C00042.png)
JPS4979784U (US08197722-20120612-C00042.png)
CH560097A5 (US08197722-20120612-C00042.png)
CH565093A5 (US08197722-20120612-C00042.png)
CH563795A5 (US08197722-20120612-C00042.png)
CH560090A5 (US08197722-20120612-C00042.png)
CH563766A5 (US08197722-20120612-C00042.png)
CH563687A5 (US08197722-20120612-C00042.png)
CH561466A5 (US08197722-20120612-C00042.png)
CH586225A5 (US08197722-20120612-C00042.png)
CH583039A5 (US08197722-20120612-C00042.png)
CH561007A5 (US08197722-20120612-C00042.png)