JPS4941294A - - Google Patents
Info
- Publication number
- JPS4941294A JPS4941294A JP47075057A JP7505772A JPS4941294A JP S4941294 A JPS4941294 A JP S4941294A JP 47075057 A JP47075057 A JP 47075057A JP 7505772 A JP7505772 A JP 7505772A JP S4941294 A JPS4941294 A JP S4941294A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Separation Of Gases By Adsorption (AREA)
- Hydrogen, Water And Hydrids (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47075057A JPS5243195B2 (en:Method) | 1972-07-28 | 1972-07-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47075057A JPS5243195B2 (en:Method) | 1972-07-28 | 1972-07-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4941294A true JPS4941294A (en:Method) | 1974-04-18 |
| JPS5243195B2 JPS5243195B2 (en:Method) | 1977-10-28 |
Family
ID=13565179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47075057A Expired JPS5243195B2 (en:Method) | 1972-07-28 | 1972-07-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5243195B2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02184501A (ja) * | 1988-12-22 | 1990-07-19 | Wacker Chemitronic Ges Elektron Grundstoffe Mbh | ハロゲン化シラン化合物を含有する担体ガスからガス状の汚染性化合物、とくにドープ成分化合物を除去する方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5387489U (en:Method) * | 1976-12-21 | 1978-07-18 | ||
| JPS5541264U (en:Method) * | 1978-09-09 | 1980-03-17 |
-
1972
- 1972-07-28 JP JP47075057A patent/JPS5243195B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02184501A (ja) * | 1988-12-22 | 1990-07-19 | Wacker Chemitronic Ges Elektron Grundstoffe Mbh | ハロゲン化シラン化合物を含有する担体ガスからガス状の汚染性化合物、とくにドープ成分化合物を除去する方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5243195B2 (en:Method) | 1977-10-28 |