JPS4940920B1 - - Google Patents
Info
- Publication number
- JPS4940920B1 JPS4940920B1 JP45009228A JP922870A JPS4940920B1 JP S4940920 B1 JPS4940920 B1 JP S4940920B1 JP 45009228 A JP45009228 A JP 45009228A JP 922870 A JP922870 A JP 922870A JP S4940920 B1 JPS4940920 B1 JP S4940920B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Tubes For Measurement (AREA)
- Physical Vapour Deposition (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB6288/69A GB1280011A (en) | 1969-02-05 | 1969-02-05 | Improvements in or relating to ion beam separators |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4940920B1 true JPS4940920B1 (fr) | 1974-11-06 |
Family
ID=9811752
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP45009228A Pending JPS4940920B1 (fr) | 1969-02-05 | 1970-02-02 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS4940920B1 (fr) |
DE (1) | DE7002990U (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52144516U (fr) * | 1976-04-28 | 1977-11-01 |
-
1970
- 1970-01-29 DE DE7002990U patent/DE7002990U/de not_active Expired
- 1970-02-02 JP JP45009228A patent/JPS4940920B1/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52144516U (fr) * | 1976-04-28 | 1977-11-01 |
Also Published As
Publication number | Publication date |
---|---|
DE7002990U (de) | 1970-09-03 |