JPS4940920B1 - - Google Patents

Info

Publication number
JPS4940920B1
JPS4940920B1 JP45009228A JP922870A JPS4940920B1 JP S4940920 B1 JPS4940920 B1 JP S4940920B1 JP 45009228 A JP45009228 A JP 45009228A JP 922870 A JP922870 A JP 922870A JP S4940920 B1 JPS4940920 B1 JP S4940920B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP45009228A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB6288/69A external-priority patent/GB1280011A/en
Application filed filed Critical
Publication of JPS4940920B1 publication Critical patent/JPS4940920B1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
JP45009228A 1969-02-05 1970-02-02 Pending JPS4940920B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB6288/69A GB1280011A (en) 1969-02-05 1969-02-05 Improvements in or relating to ion beam separators

Publications (1)

Publication Number Publication Date
JPS4940920B1 true JPS4940920B1 (fr) 1974-11-06

Family

ID=9811752

Family Applications (1)

Application Number Title Priority Date Filing Date
JP45009228A Pending JPS4940920B1 (fr) 1969-02-05 1970-02-02

Country Status (2)

Country Link
JP (1) JPS4940920B1 (fr)
DE (1) DE7002990U (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52144516U (fr) * 1976-04-28 1977-11-01

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52144516U (fr) * 1976-04-28 1977-11-01

Also Published As

Publication number Publication date
DE7002990U (de) 1970-09-03

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