JPS4940856A - - Google Patents
Info
- Publication number
- JPS4940856A JPS4940856A JP8455772A JP8455772A JPS4940856A JP S4940856 A JPS4940856 A JP S4940856A JP 8455772 A JP8455772 A JP 8455772A JP 8455772 A JP8455772 A JP 8455772A JP S4940856 A JPS4940856 A JP S4940856A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8455772A JPS4940856A (ja) | 1972-08-25 | 1972-08-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8455772A JPS4940856A (ja) | 1972-08-25 | 1972-08-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4940856A true JPS4940856A (ja) | 1974-04-17 |
Family
ID=13833933
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8455772A Pending JPS4940856A (ja) | 1972-08-25 | 1972-08-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4940856A (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52120777A (en) * | 1976-04-02 | 1977-10-11 | Ibm | Ic |
| JPS58138035A (ja) * | 1982-02-12 | 1983-08-16 | Nec Corp | 半導体装置及びその製造方法 |
| JP2005129559A (ja) * | 2003-10-21 | 2005-05-19 | Oki Electric Ind Co Ltd | 半導体ウェーハの不純物除去方法及び半導体装置 |
-
1972
- 1972-08-25 JP JP8455772A patent/JPS4940856A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52120777A (en) * | 1976-04-02 | 1977-10-11 | Ibm | Ic |
| JPS58138035A (ja) * | 1982-02-12 | 1983-08-16 | Nec Corp | 半導体装置及びその製造方法 |
| JP2005129559A (ja) * | 2003-10-21 | 2005-05-19 | Oki Electric Ind Co Ltd | 半導体ウェーハの不純物除去方法及び半導体装置 |