JPS4940682U - - Google Patents
Info
- Publication number
- JPS4940682U JPS4940682U JP8287472U JP8287472U JPS4940682U JP S4940682 U JPS4940682 U JP S4940682U JP 8287472 U JP8287472 U JP 8287472U JP 8287472 U JP8287472 U JP 8287472U JP S4940682 U JPS4940682 U JP S4940682U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Table Equipment (AREA)
- Springs (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8287472U JPS4940682U (ja) | 1972-07-13 | 1972-07-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8287472U JPS4940682U (ja) | 1972-07-13 | 1972-07-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4940682U true JPS4940682U (ja) | 1974-04-10 |
Family
ID=27990668
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8287472U Pending JPS4940682U (ja) | 1972-07-13 | 1972-07-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS4940682U (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5027782A (ja) * | 1973-07-14 | 1975-03-22 | ||
JPS526378A (en) * | 1975-07-04 | 1977-01-18 | Matsushita Electric Ind Co Ltd | Vessel for powder target |
JPS526379A (en) * | 1975-07-04 | 1977-01-18 | Matsushita Electric Ind Co Ltd | Vessel for powder target |
JPS57145981A (en) * | 1981-03-03 | 1982-09-09 | Toshiba Corp | Target for sputtering device |
-
1972
- 1972-07-13 JP JP8287472U patent/JPS4940682U/ja active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5027782A (ja) * | 1973-07-14 | 1975-03-22 | ||
JPS5224515B2 (ja) * | 1973-07-14 | 1977-07-01 | ||
JPS526378A (en) * | 1975-07-04 | 1977-01-18 | Matsushita Electric Ind Co Ltd | Vessel for powder target |
JPS526379A (en) * | 1975-07-04 | 1977-01-18 | Matsushita Electric Ind Co Ltd | Vessel for powder target |
JPS57145981A (en) * | 1981-03-03 | 1982-09-09 | Toshiba Corp | Target for sputtering device |
JPH0215631B2 (ja) * | 1981-03-03 | 1990-04-12 | Tokyo Shibaura Electric Co |