JPS4940326A - - Google Patents
Info
- Publication number
- JPS4940326A JPS4940326A JP8538072A JP8538072A JPS4940326A JP S4940326 A JPS4940326 A JP S4940326A JP 8538072 A JP8538072 A JP 8538072A JP 8538072 A JP8538072 A JP 8538072A JP S4940326 A JPS4940326 A JP S4940326A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Paints Or Removers (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8538072A JPS4940326A (cs) | 1972-08-28 | 1972-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8538072A JPS4940326A (cs) | 1972-08-28 | 1972-08-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4940326A true JPS4940326A (cs) | 1974-04-15 |
Family
ID=13857111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8538072A Pending JPS4940326A (cs) | 1972-08-28 | 1972-08-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4940326A (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01276720A (ja) * | 1988-04-28 | 1989-11-07 | Hitachi Ltd | 半導体基板の表面処理方法、半導体基板の表面処理装置及び半導体基板表面処理膜 |
-
1972
- 1972-08-28 JP JP8538072A patent/JPS4940326A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01276720A (ja) * | 1988-04-28 | 1989-11-07 | Hitachi Ltd | 半導体基板の表面処理方法、半導体基板の表面処理装置及び半導体基板表面処理膜 |