JPS49387B1 - - Google Patents
Info
- Publication number
- JPS49387B1 JPS49387B1 JP45048400A JP4840070A JPS49387B1 JP S49387 B1 JPS49387 B1 JP S49387B1 JP 45048400 A JP45048400 A JP 45048400A JP 4840070 A JP4840070 A JP 4840070A JP S49387 B1 JPS49387 B1 JP S49387B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE1929422A DE1929422B2 (en) | 1969-06-10 | 1969-06-10 | Device for the epitaxial deposition of semiconductor material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS49387B1 true JPS49387B1 (en) | 1974-01-07 |
Family
ID=5736590
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP45048400A Pending JPS49387B1 (en) | 1969-06-10 | 1970-06-04 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US3704987A (en) |
| JP (1) | JPS49387B1 (en) |
| DE (1) | DE1929422B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5962970U (en) * | 1982-10-19 | 1984-04-25 | 瓜生製作株式会社 | Variable pitch device for multi-axis nut runner |
| JPS5986928U (en) * | 1982-12-01 | 1984-06-12 | 瓜生製作株式会社 | Variable pitch device for multi-axis nut runner |
| JPS6012705U (en) * | 1983-07-07 | 1985-01-28 | 株式会社神戸製鋼所 | actuator |
| JPS61116109A (en) * | 1984-11-03 | 1986-06-03 | フエスト コマンデイト ゲゼルシヤフト | Working cylinder assembled from annular member and manufacture thereof |
| JPH01120406A (en) * | 1987-10-30 | 1989-05-12 | Kazuharu Ueda | Cylinder |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2943634C2 (en) * | 1979-10-29 | 1983-09-29 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Epitaxial reactor |
| US4275282A (en) * | 1980-03-24 | 1981-06-23 | Rca Corporation | Centering support for a rotatable wafer support susceptor |
| US4696833A (en) * | 1982-08-27 | 1987-09-29 | Hewlett-Packard Company | Method for applying a uniform coating to integrated circuit wafers by means of chemical deposition |
| US4545327A (en) * | 1982-08-27 | 1985-10-08 | Anicon, Inc. | Chemical vapor deposition apparatus |
| US4539933A (en) * | 1983-08-31 | 1985-09-10 | Anicon, Inc. | Chemical vapor deposition apparatus |
| US4524719A (en) * | 1983-09-06 | 1985-06-25 | Anicon, Inc. | Substrate loading means for a chemical vapor deposition apparatus |
| US4694779A (en) * | 1984-10-19 | 1987-09-22 | Tetron, Inc. | Reactor apparatus for semiconductor wafer processing |
| US5002011A (en) * | 1987-04-14 | 1991-03-26 | Kabushiki Kaisha Toshiba | Vapor deposition apparatus |
| US5169478A (en) * | 1987-10-08 | 1992-12-08 | Friendtech Laboratory, Ltd. | Apparatus for manufacturing semiconductor devices |
| US4979465A (en) * | 1989-04-03 | 1990-12-25 | Daidousanso Co., Ltd. | Apparatus for producing semiconductors |
| US5320680A (en) * | 1991-04-25 | 1994-06-14 | Silicon Valley Group, Inc. | Primary flow CVD apparatus comprising gas preheater and means for substantially eddy-free gas flow |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1056449B (en) * | 1954-03-12 | 1959-04-30 | Metallgesellschaft Ag | Process for the production of coatings from hard carbides |
| US3246627A (en) * | 1962-10-05 | 1966-04-19 | Union Carbide Corp | Apparatus for vapor deposition |
| US3189494A (en) * | 1963-08-22 | 1965-06-15 | Texas Instruments Inc | Epitaxial crystal growth onto a stabilizing layer which prevents diffusion from the substrate |
| US3338761A (en) * | 1965-03-31 | 1967-08-29 | Texas Instruments Inc | Method and apparatus for making compound materials |
| US3464846A (en) * | 1965-12-08 | 1969-09-02 | Ethyl Corp | Method and apparatus for centrifugally plating |
| US3424629A (en) * | 1965-12-13 | 1969-01-28 | Ibm | High capacity epitaxial apparatus and method |
| US3460510A (en) * | 1966-05-12 | 1969-08-12 | Dow Corning | Large volume semiconductor coating reactor |
| US3384049A (en) * | 1966-10-27 | 1968-05-21 | Emil R. Capita | Vapor deposition apparatus including centrifugal force substrate-holding means |
| US3594227A (en) * | 1968-07-12 | 1971-07-20 | Bell Telephone Labor Inc | Method for treating semiconductor slices with gases |
-
1969
- 1969-06-10 DE DE1929422A patent/DE1929422B2/en active Granted
-
1970
- 1970-06-04 JP JP45048400A patent/JPS49387B1/ja active Pending
- 1970-06-05 US US43776A patent/US3704987A/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5962970U (en) * | 1982-10-19 | 1984-04-25 | 瓜生製作株式会社 | Variable pitch device for multi-axis nut runner |
| JPS5986928U (en) * | 1982-12-01 | 1984-06-12 | 瓜生製作株式会社 | Variable pitch device for multi-axis nut runner |
| JPS6012705U (en) * | 1983-07-07 | 1985-01-28 | 株式会社神戸製鋼所 | actuator |
| JPS61116109A (en) * | 1984-11-03 | 1986-06-03 | フエスト コマンデイト ゲゼルシヤフト | Working cylinder assembled from annular member and manufacture thereof |
| JPH01120406A (en) * | 1987-10-30 | 1989-05-12 | Kazuharu Ueda | Cylinder |
Also Published As
| Publication number | Publication date |
|---|---|
| DE1929422A1 (en) | 1970-12-23 |
| DE1929422B2 (en) | 1974-08-15 |
| DE1929422C3 (en) | 1975-04-03 |
| US3704987A (en) | 1972-12-05 |