JPS4936544A - - Google Patents
Info
- Publication number
- JPS4936544A JPS4936544A JP7927872A JP7927872A JPS4936544A JP S4936544 A JPS4936544 A JP S4936544A JP 7927872 A JP7927872 A JP 7927872A JP 7927872 A JP7927872 A JP 7927872A JP S4936544 A JPS4936544 A JP S4936544A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7927872A JPS5222335B2 (sk) | 1972-08-08 | 1972-08-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7927872A JPS5222335B2 (sk) | 1972-08-08 | 1972-08-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4936544A true JPS4936544A (sk) | 1974-04-04 |
| JPS5222335B2 JPS5222335B2 (sk) | 1977-06-16 |
Family
ID=13685388
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7927872A Expired JPS5222335B2 (sk) | 1972-08-08 | 1972-08-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5222335B2 (sk) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52140480A (en) * | 1976-05-20 | 1977-11-24 | Nippon Telegr & Teleph Corp <Ntt> | Sputtering evaporation apparatus by ion beam |
| JP2009024236A (ja) * | 2007-07-23 | 2009-02-05 | Toshiba Corp | 成膜装置および成膜方法 |
| JP2009057583A (ja) * | 2007-08-30 | 2009-03-19 | Toshiba Corp | 成膜装置および成膜方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5734095Y2 (sk) * | 1977-10-07 | 1982-07-28 | ||
| JPS61244740A (ja) * | 1985-04-22 | 1986-10-31 | 花王株式会社 | 吊り手付カ−トン |
-
1972
- 1972-08-08 JP JP7927872A patent/JPS5222335B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52140480A (en) * | 1976-05-20 | 1977-11-24 | Nippon Telegr & Teleph Corp <Ntt> | Sputtering evaporation apparatus by ion beam |
| JP2009024236A (ja) * | 2007-07-23 | 2009-02-05 | Toshiba Corp | 成膜装置および成膜方法 |
| JP2009057583A (ja) * | 2007-08-30 | 2009-03-19 | Toshiba Corp | 成膜装置および成膜方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5222335B2 (sk) | 1977-06-16 |