JPS4936120A - - Google Patents
Info
- Publication number
- JPS4936120A JPS4936120A JP7853572A JP7853572A JPS4936120A JP S4936120 A JPS4936120 A JP S4936120A JP 7853572 A JP7853572 A JP 7853572A JP 7853572 A JP7853572 A JP 7853572A JP S4936120 A JPS4936120 A JP S4936120A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Building Environments (AREA)
- Laminated Bodies (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP47078535A JPS5219370B2 (ja) | 1972-08-06 | 1972-08-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP47078535A JPS5219370B2 (ja) | 1972-08-06 | 1972-08-06 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4936120A true JPS4936120A (ja) | 1974-04-03 |
JPS5219370B2 JPS5219370B2 (ja) | 1977-05-27 |
Family
ID=13664591
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP47078535A Expired JPS5219370B2 (ja) | 1972-08-06 | 1972-08-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5219370B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62216335A (ja) * | 1986-03-18 | 1987-09-22 | Fujitsu Ltd | ドライエツチング方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54137385U (ja) * | 1978-03-16 | 1979-09-22 |
-
1972
- 1972-08-06 JP JP47078535A patent/JPS5219370B2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62216335A (ja) * | 1986-03-18 | 1987-09-22 | Fujitsu Ltd | ドライエツチング方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS5219370B2 (ja) | 1977-05-27 |