JPS4934573B1 - - Google Patents
Info
- Publication number
- JPS4934573B1 JPS4934573B1 JP9716970A JP9716970A JPS4934573B1 JP S4934573 B1 JPS4934573 B1 JP S4934573B1 JP 9716970 A JP9716970 A JP 9716970A JP 9716970 A JP9716970 A JP 9716970A JP S4934573 B1 JPS4934573 B1 JP S4934573B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9716970A JPS4934573B1 (fr) | 1970-11-06 | 1970-11-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9716970A JPS4934573B1 (fr) | 1970-11-06 | 1970-11-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4934573B1 true JPS4934573B1 (fr) | 1974-09-14 |
Family
ID=14185062
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9716970A Pending JPS4934573B1 (fr) | 1970-11-06 | 1970-11-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS4934573B1 (fr) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004027107A1 (fr) * | 2002-09-20 | 2004-04-01 | Japan Science And Technology Agency | Mecanisme de masquage destine a un dispositif de formation de films |
WO2004083481A1 (fr) * | 2003-03-20 | 2004-09-30 | Japan Science And Technology Agency | Procede de preparation d'un film a gradient de rapport de composition quaternaire, procede de preparation d'un film a gradient d'epaisseur/de rapport de composition binaire utilise dans celui-ci et procede d'echantillonnage du rapport de composition d'une substance a composition multiple |
JP2007508450A (ja) * | 2003-10-09 | 2007-04-05 | ユニヴァーシティ・オブ・サウザンプトン | 蒸着法 |
JP2009155319A (ja) * | 1994-10-18 | 2009-07-16 | Regents Of The Univ Of California | 新規材料の組合せ合成方法 |
JP2020084254A (ja) * | 2018-11-22 | 2020-06-04 | 長州産業株式会社 | 蒸着装置及び蒸着方法 |
-
1970
- 1970-11-06 JP JP9716970A patent/JPS4934573B1/ja active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009155319A (ja) * | 1994-10-18 | 2009-07-16 | Regents Of The Univ Of California | 新規材料の組合せ合成方法 |
WO2004027107A1 (fr) * | 2002-09-20 | 2004-04-01 | Japan Science And Technology Agency | Mecanisme de masquage destine a un dispositif de formation de films |
US9157144B2 (en) | 2002-09-20 | 2015-10-13 | Japan Science And Technology Agency | Masking mechanism for film forming apparatus |
WO2004083481A1 (fr) * | 2003-03-20 | 2004-09-30 | Japan Science And Technology Agency | Procede de preparation d'un film a gradient de rapport de composition quaternaire, procede de preparation d'un film a gradient d'epaisseur/de rapport de composition binaire utilise dans celui-ci et procede d'echantillonnage du rapport de composition d'une substance a composition multiple |
JP2007508450A (ja) * | 2003-10-09 | 2007-04-05 | ユニヴァーシティ・オブ・サウザンプトン | 蒸着法 |
JP2020084254A (ja) * | 2018-11-22 | 2020-06-04 | 長州産業株式会社 | 蒸着装置及び蒸着方法 |