JPS4934346A - - Google Patents

Info

Publication number
JPS4934346A
JPS4934346A JP7513672A JP7513672A JPS4934346A JP S4934346 A JPS4934346 A JP S4934346A JP 7513672 A JP7513672 A JP 7513672A JP 7513672 A JP7513672 A JP 7513672A JP S4934346 A JPS4934346 A JP S4934346A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7513672A
Other languages
Japanese (ja)
Other versions
JPS5213940B2 (hr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7513672A priority Critical patent/JPS5213940B2/ja
Publication of JPS4934346A publication Critical patent/JPS4934346A/ja
Publication of JPS5213940B2 publication Critical patent/JPS5213940B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Closed-Circuit Television Systems (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP7513672A 1972-07-28 1972-07-28 Expired JPS5213940B2 (hr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7513672A JPS5213940B2 (hr) 1972-07-28 1972-07-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7513672A JPS5213940B2 (hr) 1972-07-28 1972-07-28

Publications (2)

Publication Number Publication Date
JPS4934346A true JPS4934346A (hr) 1974-03-29
JPS5213940B2 JPS5213940B2 (hr) 1977-04-18

Family

ID=13567459

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7513672A Expired JPS5213940B2 (hr) 1972-07-28 1972-07-28

Country Status (1)

Country Link
JP (1) JPS5213940B2 (hr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02310450A (ja) * 1989-05-26 1990-12-26 Hajime Sangyo Kk 物体の検査装置
JPH03117709U (hr) * 1990-03-15 1991-12-05

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5440752U (hr) * 1977-08-20 1979-03-17

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02310450A (ja) * 1989-05-26 1990-12-26 Hajime Sangyo Kk 物体の検査装置
JPH03117709U (hr) * 1990-03-15 1991-12-05

Also Published As

Publication number Publication date
JPS5213940B2 (hr) 1977-04-18

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