JPS4933553A - - Google Patents
Info
- Publication number
- JPS4933553A JPS4933553A JP7417472A JP7417472A JPS4933553A JP S4933553 A JPS4933553 A JP S4933553A JP 7417472 A JP7417472 A JP 7417472A JP 7417472 A JP7417472 A JP 7417472A JP S4933553 A JPS4933553 A JP S4933553A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7417472A JPS4933553A (enEXAMPLES) | 1972-07-26 | 1972-07-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7417472A JPS4933553A (enEXAMPLES) | 1972-07-26 | 1972-07-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4933553A true JPS4933553A (enEXAMPLES) | 1974-03-28 |
Family
ID=13539518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7417472A Pending JPS4933553A (enEXAMPLES) | 1972-07-26 | 1972-07-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4933553A (enEXAMPLES) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57106120A (en) * | 1980-12-24 | 1982-07-01 | Fujitsu Ltd | Manufacture of semiconductor device |
| JPS57108437U (enEXAMPLES) * | 1980-12-19 | 1982-07-05 | ||
| JPS57197824A (en) * | 1981-05-12 | 1982-12-04 | Siemens Ag | Method and device for filling impurity to semiconductor material |
| JPS59155135A (ja) * | 1983-02-23 | 1984-09-04 | Mitsubishi Electric Corp | 膜形成方法およびその装置 |
| JPS61292315A (ja) * | 1985-06-20 | 1986-12-23 | Sanyo Electric Co Ltd | 選択エピタキシヤル法 |
-
1972
- 1972-07-26 JP JP7417472A patent/JPS4933553A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57108437U (enEXAMPLES) * | 1980-12-19 | 1982-07-05 | ||
| JPS57106120A (en) * | 1980-12-24 | 1982-07-01 | Fujitsu Ltd | Manufacture of semiconductor device |
| JPS57197824A (en) * | 1981-05-12 | 1982-12-04 | Siemens Ag | Method and device for filling impurity to semiconductor material |
| JPS59155135A (ja) * | 1983-02-23 | 1984-09-04 | Mitsubishi Electric Corp | 膜形成方法およびその装置 |
| JPS61292315A (ja) * | 1985-06-20 | 1986-12-23 | Sanyo Electric Co Ltd | 選択エピタキシヤル法 |