JPS493320A - - Google Patents

Info

Publication number
JPS493320A
JPS493320A JP4389672A JP4389672A JPS493320A JP S493320 A JPS493320 A JP S493320A JP 4389672 A JP4389672 A JP 4389672A JP 4389672 A JP4389672 A JP 4389672A JP S493320 A JPS493320 A JP S493320A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4389672A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4389672A priority Critical patent/JPS493320A/ja
Publication of JPS493320A publication Critical patent/JPS493320A/ja
Pending legal-status Critical Current

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JP4389672A 1972-05-02 1972-05-02 Pending JPS493320A (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4389672A JPS493320A (de) 1972-05-02 1972-05-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4389672A JPS493320A (de) 1972-05-02 1972-05-02

Publications (1)

Publication Number Publication Date
JPS493320A true JPS493320A (de) 1974-01-12

Family

ID=12676456

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4389672A Pending JPS493320A (de) 1972-05-02 1972-05-02

Country Status (1)

Country Link
JP (1) JPS493320A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5364463A (en) * 1976-11-22 1978-06-08 Nippon Telegr & Teleph Corp <Ntt> Fixing tray of semiconductor wafers

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5364463A (en) * 1976-11-22 1978-06-08 Nippon Telegr & Teleph Corp <Ntt> Fixing tray of semiconductor wafers
JPS542537B2 (de) * 1976-11-22 1979-02-08

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