JPS4928463U - - Google Patents
Info
- Publication number
- JPS4928463U JPS4928463U JP7112872U JP7112872U JPS4928463U JP S4928463 U JPS4928463 U JP S4928463U JP 7112872 U JP7112872 U JP 7112872U JP 7112872 U JP7112872 U JP 7112872U JP S4928463 U JPS4928463 U JP S4928463U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7112872U JPS4928463U (enExample) | 1972-06-15 | 1972-06-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7112872U JPS4928463U (enExample) | 1972-06-15 | 1972-06-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4928463U true JPS4928463U (enExample) | 1974-03-11 |
Family
ID=27969017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7112872U Pending JPS4928463U (enExample) | 1972-06-15 | 1972-06-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4928463U (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5787057U (enExample) * | 1980-11-12 | 1982-05-28 | ||
| JPS58176959U (ja) * | 1982-05-20 | 1983-11-26 | 三洋電機株式会社 | Cvd装置 |
| JPS60212220A (ja) * | 1984-04-06 | 1985-10-24 | Ushio Inc | 光化学反応装置 |
| JPS6140024A (ja) * | 1984-07-31 | 1986-02-26 | Toshiba Mach Co Ltd | 薄膜形成装置の冷却装置および冷却方法 |
| JPS6140023A (ja) * | 1984-07-31 | 1986-02-26 | Toshiba Mach Co Ltd | 薄膜形成装置の冷却方法 |
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1972
- 1972-06-15 JP JP7112872U patent/JPS4928463U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5787057U (enExample) * | 1980-11-12 | 1982-05-28 | ||
| JPS58176959U (ja) * | 1982-05-20 | 1983-11-26 | 三洋電機株式会社 | Cvd装置 |
| JPS60212220A (ja) * | 1984-04-06 | 1985-10-24 | Ushio Inc | 光化学反応装置 |
| JPS6140024A (ja) * | 1984-07-31 | 1986-02-26 | Toshiba Mach Co Ltd | 薄膜形成装置の冷却装置および冷却方法 |
| JPS6140023A (ja) * | 1984-07-31 | 1986-02-26 | Toshiba Mach Co Ltd | 薄膜形成装置の冷却方法 |