JPS4928463U - - Google Patents

Info

Publication number
JPS4928463U
JPS4928463U JP7112872U JP7112872U JPS4928463U JP S4928463 U JPS4928463 U JP S4928463U JP 7112872 U JP7112872 U JP 7112872U JP 7112872 U JP7112872 U JP 7112872U JP S4928463 U JPS4928463 U JP S4928463U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7112872U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7112872U priority Critical patent/JPS4928463U/ja
Publication of JPS4928463U publication Critical patent/JPS4928463U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP7112872U 1972-06-15 1972-06-15 Pending JPS4928463U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7112872U JPS4928463U (enrdf_load_stackoverflow) 1972-06-15 1972-06-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7112872U JPS4928463U (enrdf_load_stackoverflow) 1972-06-15 1972-06-15

Publications (1)

Publication Number Publication Date
JPS4928463U true JPS4928463U (enrdf_load_stackoverflow) 1974-03-11

Family

ID=27969017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7112872U Pending JPS4928463U (enrdf_load_stackoverflow) 1972-06-15 1972-06-15

Country Status (1)

Country Link
JP (1) JPS4928463U (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5787057U (enrdf_load_stackoverflow) * 1980-11-12 1982-05-28
JPS58176959U (ja) * 1982-05-20 1983-11-26 三洋電機株式会社 Cvd装置
JPS60212220A (ja) * 1984-04-06 1985-10-24 Ushio Inc 光化学反応装置
JPS6140024A (ja) * 1984-07-31 1986-02-26 Toshiba Mach Co Ltd 薄膜形成装置の冷却装置および冷却方法
JPS6140023A (ja) * 1984-07-31 1986-02-26 Toshiba Mach Co Ltd 薄膜形成装置の冷却方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5787057U (enrdf_load_stackoverflow) * 1980-11-12 1982-05-28
JPS58176959U (ja) * 1982-05-20 1983-11-26 三洋電機株式会社 Cvd装置
JPS60212220A (ja) * 1984-04-06 1985-10-24 Ushio Inc 光化学反応装置
JPS6140024A (ja) * 1984-07-31 1986-02-26 Toshiba Mach Co Ltd 薄膜形成装置の冷却装置および冷却方法
JPS6140023A (ja) * 1984-07-31 1986-02-26 Toshiba Mach Co Ltd 薄膜形成装置の冷却方法

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