JPS4926748A - - Google Patents
Info
- Publication number
- JPS4926748A JPS4926748A JP6757272A JP6757272A JPS4926748A JP S4926748 A JPS4926748 A JP S4926748A JP 6757272 A JP6757272 A JP 6757272A JP 6757272 A JP6757272 A JP 6757272A JP S4926748 A JPS4926748 A JP S4926748A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6757272A JPS5525486B2 (jp) | 1972-07-07 | 1972-07-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6757272A JPS5525486B2 (jp) | 1972-07-07 | 1972-07-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4926748A true JPS4926748A (jp) | 1974-03-09 |
| JPS5525486B2 JPS5525486B2 (jp) | 1980-07-07 |
Family
ID=13348787
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6757272A Expired JPS5525486B2 (jp) | 1972-07-07 | 1972-07-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5525486B2 (jp) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50148551U (jp) * | 1974-05-29 | 1975-12-10 | ||
| JPS62198119A (ja) * | 1986-02-25 | 1987-09-01 | Morita Mfg Co Ltd | 硼素拡散方法並びにその装置 |
| JPH01169924A (ja) * | 1986-10-29 | 1989-07-05 | Mitel Corp | 不純物拡散方法 |
| JPH0277118A (ja) * | 1988-09-13 | 1990-03-16 | Shin Etsu Handotai Co Ltd | 半導体ウェーハへの硼素拡散方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5551109U (jp) * | 1978-09-29 | 1980-04-04 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4029370Y1 (jp) * | 1963-10-30 | 1965-10-13 | ||
| JPS4111901Y1 (jp) * | 1964-03-19 | 1966-06-03 |
-
1972
- 1972-07-07 JP JP6757272A patent/JPS5525486B2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4029370Y1 (jp) * | 1963-10-30 | 1965-10-13 | ||
| JPS4111901Y1 (jp) * | 1964-03-19 | 1966-06-03 |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50148551U (jp) * | 1974-05-29 | 1975-12-10 | ||
| JPS5524817Y2 (jp) * | 1974-05-29 | 1980-06-14 | ||
| JPS62198119A (ja) * | 1986-02-25 | 1987-09-01 | Morita Mfg Co Ltd | 硼素拡散方法並びにその装置 |
| JPH01169924A (ja) * | 1986-10-29 | 1989-07-05 | Mitel Corp | 不純物拡散方法 |
| JPH0324055B2 (jp) * | 1986-10-29 | 1991-04-02 | Mitel Corp | |
| JPH0277118A (ja) * | 1988-09-13 | 1990-03-16 | Shin Etsu Handotai Co Ltd | 半導体ウェーハへの硼素拡散方法 |
| JPH0543286B2 (jp) * | 1988-09-13 | 1993-07-01 | Shinetsu Handotai Kk |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5525486B2 (jp) | 1980-07-07 |