JPS4926748A - - Google Patents

Info

Publication number
JPS4926748A
JPS4926748A JP6757272A JP6757272A JPS4926748A JP S4926748 A JPS4926748 A JP S4926748A JP 6757272 A JP6757272 A JP 6757272A JP 6757272 A JP6757272 A JP 6757272A JP S4926748 A JPS4926748 A JP S4926748A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6757272A
Other languages
Japanese (ja)
Other versions
JPS5525486B2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6757272A priority Critical patent/JPS5525486B2/ja
Publication of JPS4926748A publication Critical patent/JPS4926748A/ja
Publication of JPS5525486B2 publication Critical patent/JPS5525486B2/ja
Expired legal-status Critical Current

Links

JP6757272A 1972-07-07 1972-07-07 Expired JPS5525486B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6757272A JPS5525486B2 (cs) 1972-07-07 1972-07-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6757272A JPS5525486B2 (cs) 1972-07-07 1972-07-07

Publications (2)

Publication Number Publication Date
JPS4926748A true JPS4926748A (cs) 1974-03-09
JPS5525486B2 JPS5525486B2 (cs) 1980-07-07

Family

ID=13348787

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6757272A Expired JPS5525486B2 (cs) 1972-07-07 1972-07-07

Country Status (1)

Country Link
JP (1) JPS5525486B2 (cs)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50148551U (cs) * 1974-05-29 1975-12-10
JPS62198119A (ja) * 1986-02-25 1987-09-01 Morita Mfg Co Ltd 硼素拡散方法並びにその装置
JPH01169924A (ja) * 1986-10-29 1989-07-05 Mitel Corp 不純物拡散方法
JPH0277118A (ja) * 1988-09-13 1990-03-16 Shin Etsu Handotai Co Ltd 半導体ウェーハへの硼素拡散方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5551109U (cs) * 1978-09-29 1980-04-04

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4029370Y1 (cs) * 1963-10-30 1965-10-13
JPS4111901Y1 (cs) * 1964-03-19 1966-06-03

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4029370Y1 (cs) * 1963-10-30 1965-10-13
JPS4111901Y1 (cs) * 1964-03-19 1966-06-03

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50148551U (cs) * 1974-05-29 1975-12-10
JPS5524817Y2 (cs) * 1974-05-29 1980-06-14
JPS62198119A (ja) * 1986-02-25 1987-09-01 Morita Mfg Co Ltd 硼素拡散方法並びにその装置
JPH01169924A (ja) * 1986-10-29 1989-07-05 Mitel Corp 不純物拡散方法
JPH0324055B2 (cs) * 1986-10-29 1991-04-02 Mitel Corp
JPH0277118A (ja) * 1988-09-13 1990-03-16 Shin Etsu Handotai Co Ltd 半導体ウェーハへの硼素拡散方法
JPH0543286B2 (cs) * 1988-09-13 1993-07-01 Shinetsu Handotai Kk

Also Published As

Publication number Publication date
JPS5525486B2 (cs) 1980-07-07

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